利用雙光軸共焦顯微術同時量測透明物質之折射係數與厚度

包鈺楷

指導教授 ： 郭文娟

國立臺灣師範大學/理學院/光電科技研究所/碩士(2010年)

摘要

於本文中，我們以高斯光學之理論為基礎，推導出能同時量測透明物質之折射率與厚度之公式，並以之與幾何光學之理論模型進行比較。同時，透過諾瑪斯基分光稜鏡(Nomarski prism)之使用，我們發展出一套雙軸共焦顯微技術，並以此當作光學實驗之基礎架構。於樣品折射率與厚度之量測實驗中，我們透過掃描包含顯微鏡蓋玻片、鍍光阻之矽基板、微透鏡陣列等之多種樣品成功測試了該理論與架構之正確性與精準度。

關鍵字

高斯光學 ； 共焦顯微術

並列摘要

In this thesis Gaussian beam optical theory is applied to put forward a more accurate equation by which refractive index and thickness of transparent material can be simultaneously calculated within single scan of a novel dual-beam confocal microscope. Specimens of commercial microscope cover glasses, silicon substrate coated with photoresist, and microlens array are being scanned to investigate the accuracy of the proposed method and optical setup. Our experimental results show consistency with results yielded from other reliable imaging methods. We have presented and demonstrated a simple and accurate method for simultaneous measurement of refractive index and thickness of optically transparent media. This technique has potential for bio-imaging and other noncontact imaging applications.

參考文獻

[2] Ilko K. Ilev, Ronald W. Waynant, Kimberly R. Byrnes, Juanita J. Anders, "Dual confocal fiber-optic method for absolute measurement of refractive index and thickness of optically transparent media", OPTICS LETTERS, Vol. 27, No. 19, 2002

[3] Masamitsu Haruna, Masato Ohmi, Teruki Mitsuyama, Hideyuki Tajiri, Hideki Maruyama, and Masahiro Hashimoto, "Simultaneous measurement of the phase and group indices and the thickness of transparent plates by low-coherence interferometry," Opt. Lett. 23, 966-968 (1998)

[4] G. J. Tearney, M. E. Brezinski, J. F. Southern, B. E. Bouma, M. R. Hee, and J. G. Fujimoto, "Determination of the refractive index of highly scattering human tissue by optical coherence tomography," Opt. Lett. 20, 2258-2260 (1995)

[5] Seokhan Kim, Jihoon Na, Myoung Jin Kim, Byeong Ha Lee, 1 Oryong-dong, Buk-Gu, Gwangju, "Simultaneous measurement of refractive index and thickness by combining low-coherence interferometry and confocal optics" OPTICS EXPRESS, Vol. 16, No. 8, 2008

[6] Takashi Fukano, Ichirou Yamaguchi, "Separation of measurement of the refractive index and the geometric thickness by use of a wavelength-scanning interferometer with a confocal microscope", APPLIED OPTICS, Vol. 38, No. 19, 1999