設計與製作雷射干涉儀應用於精密運動控制系統

Design and Implementation of Laser Interferometry Applied in Precision Motion-Control System

蘇峻緯

指導教授 ： 陳美勇

國立臺灣師範大學/科技學院/機電科技研究所/碩士(2007年)

摘要

本研究之動機在設計與製作雷射干涉儀應用於精密運動控制系統，自行設計與組裝雷射干涉儀系統進行量測運動平台精密微位移，同時希望達到高穩定性、高準確性、高重複性、架構簡單與低價格的方式呈現出來，除此之外，我們使用CCD的方式擷取影像數據來做分析，不僅可以明確的校整整體系統進而提高準確度，同時還利用VB的程式軟體設計達到動態回授的分析與補償功能。
　　本研究的最主要貢獻，可大致分為?方面??明。在實際應用面上，可?是成功地整合?平台設計概?、位移?測、控制??三大?域，以最簡單的架構，將一具有長?程定位系統建?起?，其最終能達成依循位移計刻?位置進?移動的目標，及快速定位；而在控制??上，則以PID迴授控制原?，以?於實現的控制?程，同時經由研究中的應用可以證明，以PID迴授控制原?，也能夠適用於超??要求的系統。
　　本論文所設計的雷射干涉儀系統，是透過CCD的方式來觀察干涉圖形的變化來提高實驗校整性，有別於一般的光二極體感測方式。而即時系統方面，我們利用撰寫VB的程式來驗證即時系統，當我們不停改變CCD的擷取速度時，則VB的程式介面也會不停的即時更新。最後的正弦波運動控制實驗中，由於雜訊的干擾甚大，很難達到動態回授的分析與補償功能，我們改用非動態量測的方式，發現當電流漸漸增高時，則相對位移的變化量會越來越大。

關鍵字

干涉 ； 雷射干涉儀 ； 精密運動

並列摘要

This paper proposes a design and implementation of a laser interferometry apply in precision motion-control system, which design and assemble the going on amount of the laser interferometer system and examine the accurate little displacement of sport platform by myself. At the same time, I hope to reach high stability, high accuracy, high repetitiveness, simple structure and low cost. In addition, we use the CCD to fetch and analysis the image data, then the system improves accuracy. Still utilize procedure software design of VB to reach the analysis that is tickled dynamically and compensation function at the same time.
　　The main contribution of this research, can be divided into two respects to prove. In using the surface actually, it is succeed in combining the concept of design of platform, displacement measurement, control theory in three major fields. With the simplest structure will have navigation systems of a long journey that will be set up. Finally, it can reach in accordance with following the goal moved in scale position of displacement meter, and make a reservation fast. On the control theory, tickle the principle of controlling with PID, the control procedure easy to realize. At the same time, tickle the principle of controlling with PID can be suitable for the system that the ultra precision require too.
　　Our laser interferometer system, it is through the CCD to observe the change which interfere the figure to enhance the experimental alignment which is different from the general photodiode. In real-time aspect, we utilize the procedure of VB to prove immediately systematically. When we change picking the speed of CCD ceaselessly, procedure of VB that interface even can pick to upgrade immediately. In the last sinusoidal wave movement controlled, the interference of the miscellaneous news is very great, it is very difficult to reach the analysis that is tickled dynamically and compensation. We use the non-dynamic to examine, when the electric current has increased gradually, relative displacement will be heavier and heavier.

並列關鍵字

Interference ； Laser interferometry ； Precision motion

參考文獻

[35] 張錚 編著，「Matlab教學範本程式設計與應用」，知城數位科技股份有限公司，中華民國94年。

[37] 張智星 編著，「Matlab程式設計與應用」，清蔚科技股份有限公司，中華民國92年。

[1] X. Wang, X. wang, et al., “Photothermal modulation of laser diode wavelength: application to sinusoidal phase-modulation interferometer for displacement measurements,” Optics & Laser Technology, pp. 559-564, December, 1999.

[2] L. Z. Cai and Y. R. Wang, “Simple real-time 3-D displacement measurement by fringe analysis using a photorefractive interferometer,” Optics and lasers in engineering, pp. 431-438, April, 2000

[3] X. Wang, X. wang, et al., “Laser diode interferometer for measuring displacements in large range with a nanometer accuracy,” Optics & Laser Technology, pp. 219-223, February, 2001.