新型單軸壓電致動平台之結構設計與特性量測

在本研究中，主要是針對自行建構的新型單軸壓電致動平台，來進行平台的步幅量測與特性分析。論文中是利用壓電蜂鳴片所製成之4-9-9-14壓電致動器來作為該平台之驅動元件，並針對4-9-9-14壓電致動器做簡單的轉速量測，由轉速量測的結果可得知4-9-9-14壓電致動器的特性較佳，所以本論文是選用4-9-9-14壓電致動器來作為實驗的驅動元件，並透過4-9-9-14壓電致動器推動精密定位平台，使平台能做水平的直線運動，接著配合使用圖形監控軟體LabVIEW及資料擷取卡NI PCI-6115，以得到光學尺擷取精密定位平台之正確位置訊號。在傳統中，藉由壓電致動器進行平台之步幅量測時，參數調控通常只改變驅動電壓的大小，來達成平台之步幅改變。但在本論文中的參數調控，不只是改變驅動電壓的大小，也將針對單位時間內之實際驅動電壓時間(亦即實際脈波驅動時間)，以及承載平台的負載狀態等，來進行參數調控，進而改變平台移動之步幅大小，達成平台之步幅量測目標。本論文將先針對平台進行無載/有載及左右固定距離之單點定位，進而得知4-9-9-14壓電致動器之步進能力；並由實驗結果可以得知，發現當驅動電壓時間相同時，平台往左移動之步幅皆小於往右移動之步幅，與轉速實驗中，轉子順時針轉之轉速小於逆時針轉之轉速，兩組實驗結果皆證實致動器的往右推移的能力較強；根據理論電壓大時所累積的推動能量相對的較多，所以移動的步幅也會變的較大，透過分析實驗數據可以證實，平台步進距離會隨著實際電壓驅動時間增加而變大，藉此了解電壓與驅動時間對於平台移動步幅大小之影響。

關鍵字

壓電致動平台；實際驅動電壓時間；資料擷取卡； LabVIEW

並列摘要

In this thesis, the novel single-axis piezoelectric actuating stage established by us is aimed to do the step measurement and characteristic analysis. We used the 4-9-9-14 piezoelectric actuator that is made of piezoelectric buzzer developed by our lab to do the simple rotation speed measurement proving its characteristic is better. The stage could do the horizontal linear motion through pushing precise positioning stage by using the 4-9-9-14 piezoelectric actuator, and combine the figure monitor software LabVIEW and the data-mining card NI PCI-6115 to obtain the precision position signal of the linear scale. In tradition, while the piezoelectric actuator is measuring the step of stage, parameter adjustment is usually changing the degree of voltage to change stage step. However in this thesis, the real propellent voltage time of the unit time and the load condition of stage would be changed which adjust the displacement of the stage to achieve the target of stage step measurement. First, the stage is positioned with a load condition and a no load condition, furthermore, the left and right distance should be immovable, by this experience, the step ability of the 4-9-9-14 piezoelectric actuator can be known. According to the experiment result, when the propellent voltage time is the same, the step of stage to left side is almost shorter than to right side as well as the rotation speed of rotor with clockwise is smaller than rotor with counterclockwise in the rotation speed experiment, which means both results could be confirmed that the moving capability of actuator to right side is better. In conclusion, there are many accumulated push energies under large voltage condition, so the moving step would become larger, which prove the longer step distance is depending on real propellent voltage time increasing and understand the influence of stage moving step on voltage and propellent voltage time.