原始氣體對超薄類鑽碳膜腐蝕與磨耗之影響

非晶質類鑽碳膜(amorphous diamond-like carbon,a-C:H)具有高硬度，高耐腐蝕、耐磨耗及低摩擦係數等優越性質。本研究主要探討在已完成磁性層濺鍍之鋁基板上，利用電漿輔助化學氣相沉積法(plasma-enhanced chemical vapor deposition, PECVD)搭配各種原始氣體(C2H2、C2H4、C2H6、CH4)分別沉積厚度2nm之類鑽碳膜於基板上，來探討原始氣體對類鑽碳膜於腐蝕溶液中之耐蝕及耐磨耗腐蝕性質之影響。以拉曼頻譜儀分析類鑽碳膜之組織與強度；利用奈米壓痕試驗量測薄膜硬度與彈性膜數；以四點式電阻測量儀來分析類鑽碳膜之電阻；以恆電位儀量測類鑽碳膜在濃度1 M H2SO4水溶液中靜態腐蝕行為。磨耗腐蝕分析則以塊對環(Block-on-ring)方式，在濃度3.5%NaCl水溶液中進行試驗，試驗後再以掃描式電子顯微鏡觀察其表面腐蝕與磨耗腐蝕形態，此外利用乾式摩擦試驗機，量測類鑽碳膜與磁頭對磨下之靜磨擦力變化。結果顯示，氫含量較高的氣體所沉積類鑽碳膜具有最低的G峰位置，而I(D)/I(G)比值亦隨著含氫量增加而降低，表示含氫量增加使得石墨成長受到抑制，故相對有助於穩定鑽石之鍵結；硬度與彈性模數亦隨著I(D)/I(G)比值降低而增加；另外因I(D)/I(G)比值降低，其類鑽碳膜石墨(SP2)鍵結減少，而得到較高的電阻。電化學結果顯示，隨著氫含量增加，使類鑽碳膜具有較良好的化學惰性，除了較貴性(noble)之腐蝕電位(Ecorr)與較大的電阻值(Rp)外，腐蝕電流密度(icorr)亦隨著薄膜中I(D)/I(G)比值下降而減少。在磨耗腐蝕，也獲得優異的耐磨耗腐蝕性及較低的摩擦係數與重量損失。乾式摩擦試驗中，氫含量增加使鍍膜具有較低靜摩擦力與穩定性。

關鍵字

類鑽碳膜；原始氣體；磨耗腐蝕；電漿輔助化學氣相沉積法

並列摘要

Amorphous hydrogenated diamond-like (a-C:H) have a high hardness, high corrosion resistance, wear resistance and low coefficient of friction and excellent properties. This study focused on the complete magnetic layer of aluminum substrate sputtering, using chemical vapor deposition plasma-enhanced (PECVD) mix of various source gas (C2H2, C2H4, C2H6, CH4) respectively 2nm sediment thickness, such as diamond-like carbon films up to the plate on the original carbon gas on class diamond-like in corrosion-resistant and solution of wear and corrosion properties. By Raman Spectrum Analyzer to analyze the type of organization and diamond-like of carbon intensity, Nano-indentation hardness measurement of thin films and elastic membrane. A four-point type resistance measuring instrument for analysis of diamond-like carbon resistor. To potentiostat measuring class concentrations of carbon in the 1 M H2SO4 solution corrosion behavior in a static; wear and corrosion analysis then Block-on-ring, concentration 3.5% NaCl solution to test, test again to scanning electron microscope observation of surface corrosion and abrasion and corrosion morphology, and reuse of dry friction tester, measuring class diamond-like heads like carbon and grinding of static friction force change. Results show that hydrogen with a high level of gas deposition Diamond-like carbon films have the lowest G peak position, and the I(D)/I(G) ratio also as hydrogen content, representing the increase in the hydrogen content makes graphite growth restrained they help stabilize bond of diamonds; hardness and modulus along with I(D)/I(G) ratio decreases; the ratio by I(D)/I(G), its class diamond-like carbon graphite (SP2) bond reduced and have higher resistance. Electrochemical results show, with the increase in the hydrogen content so that the class has a drill-like carbon films good chemical inertia, in addition to the more expensive corrosion potentials (Ecorr) and larger resistance values (Rp), and corrosion current density (icorr) along with the film I(D)/I(G) ratio declined. In wear and corrosion, but also get excellent wear resistance to corrosion and a low coefficient of friction and weight loss, dry friction test, the increase in the hydrogen content in the coating has a low static friction and stability.