精密光電測量儀之研究

Study on a Precision Electro-Optical Meter

謝孟峰(Meng-Feng Hsieh)

指導教授 ： 王信福

健行科技大學/電資學院/電子工程所/碩士(2011年)

摘要

本論文主要是進行研製一套精密光電測量儀之研究，此系統為一新型光學測量系統，其乃使用兩顆鍍上金模的直角稜鏡所組成的稜鏡組合做成感測原件。此系統主要工作原理為結合表面電漿共振原理來衰減全反射原理來進行微小角度之測量。
此一精密光電測量儀具有可即時測量、解析度更高、靈敏度更高、整體架構簡單、操作容易以及不受環境干擾等等優點，對於校正精密機械工具、調整光學系統以及其他精密角度微調的量測、分析而言，是一個相當有效益的量測工具。透過此套精密光電量測儀，吾人希冀其可以幫助國內在相關的調整光學系統、校正機械工具及其他精密角度之微調的領域上，提供良好的建議與研究方向。

關鍵字

衰減全反射 ； 表面電漿共振 ； 微小角度測量

並列摘要

In this thesis, a new-type small angle sensor based on the surface plasmon resonance technology in heterodyne interferometry is proposed. In order to increase the resolution and sensitivity of the small angle sensor, a self-made prism assembly and common-path heterodyne interferometry are used in the experimental setup. It can be found that the resolution of the new-type small angle sensor can reach radian by numerical simulation. The new-type small angle sensor has some merits, e.g., a simple optical setup, easy operation, high measurement accuracy, high resolution, high sensitivity, rapid measurement, and high stability, etc.

並列關鍵字

Surface Plasmon Resonance Technology (SPR Technology) ； Attenuated Total Reflection (ATR) ； Common-Path Heterodyne Interferometry (C-P HI) ； Small angle measurement

參考文獻

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