本論文:「精密式微小位移測量儀之研究」,乃是提出一個結合表面電漿共振原理和利用共光程外差干涉術並以微小位移之傳感方式量測。此實驗方式主要由稜鏡組和一個位移傳感裝置所組成,稜鏡組架構是由一個半波片(λ/2)、兩個直角稜鏡和兩個旋轉平台所組成,此微小位移測量儀具有很高的靈敏度和分析內部金屬衰減全反射所產生之外差干涉術。除此之外,吾人可以透過遠端使用USB數據擷取卡(DAQ card)和Zigbee傳輸模組來取得實驗數據,可以發現微小位移之理想解析度可達到0.3nm,微小位移測量儀擁有一些優點,例如:(1)操作簡單、(2)量測準確度高、(3)解析度高、(4)即時量測、(5)高靈敏度等。
In this thesis, a small-displacement sensor based on the surface plasmon resonance technology in heterodyne interferometry is proposed. The basic sensing unit is composed of a prism assembly and a displacement probe. The prism assembly consists of a half wave (λ/2) plate, two right-angle prisms and two rotation stages. The small-displacement sensor is with high sensitivity and resolution due to the attenuated total reflection effect in heterodyne interferometry. Besides, we can obtain the results of the experiment in a distant place by uses of the USB data acquisition card (DAQ card) and a ZigBee module. It can be found that the displacement resolution of the small-displacement sensor can reach 0.3nm by numerical simulation. The small-displacement sensor has some merits, e.g., easy operation, high measurement accuracy, high resolution and rapid measurement, etc.