銀及銅金屬薄膜鍍於PMMA基材表面微磨耗行為之研究

Study on Micro Wear Behavior of Silver and Copper Metal Thin Film on PMMA Substrate

黃瑞鴻(Hung-Jui Huang)

指導教授 ： 于劍平

崑山科技大學/工程學院/機械工程研究所/碩士(2008年)

摘要

近年來奈米技術不斷的提昇，探討微奈米尺度下薄膜材料表面微磨耗行為與機制，主要研究是將銀和銅的薄膜濺鍍於基材PMMA之製程技術與奈米磨潤性質探討。
本論文使用奈米性質測試儀(NanoTest)，銷對盤（Pin-On- Disc，POD）之功能來進行磨潤實驗中奈米磨耗性質量測之實驗，實驗參數設定為施加負荷、轉速及旋轉半徑等，觀察磨耗行為下表面形貌分析，可建立鍍膜後機械性質於未來研究之參考。
由實驗結果得知，其平均摩擦係數變化可區分為二個階段：第一階段是施加負荷於1mN至5mN之範圍時，由於金屬薄膜表層之黏附（adhesion）效應造成之現象；而第二階段是施加負荷於20mN至200mN之範圍時，表面犁割（ploughing）效應造成摩擦係數增加，同時發現滯滑(stick-slip)現象會出現在較大負荷作用下，這是金屬薄膜鍍在PMMA基材上由基材效應所導致之特殊現象。

關鍵字

奈米磨潤 ； 銷對盤 ； 黏附 ； 犁割 ； 摩擦係數 ； 滯滑

並列摘要

The nano technology has been advanced continuously recent years. The micro-wearing behavior and mechanism of thin film material under micro/nano scale have discussed. The most research are discuss the properties of nano-tribology and the manufacturing process technology which sputtering on the PMMA substrate.
The properties of nano-wearing experiments are measured by NanoTest and Pin-On Disc (POD), respectively. The experimental parameters are: applied load, rotational speed and rotational radius, etc. And analyze the surface morphology under wearing behavior, to create the rule which the mechanical properties after coat film for future research.
As the experimental results, the average coefficient of friction can be separated two stages: firstly, due to the adhesion effect phenomenon occurred on the surface of metal thin film when the loading is around 1 to 5mN; second is the ploughing causing the coefficient of friction increased when the loading between 20 to 200mN. The stick-slip phenomenon occurred simultaneously under large loading, it’s the special phenomenon which due to the substrate effect when the metal film coated on the PMMA substrate.

並列關鍵字

Nano-tribology ； Pin-on-Disc (POD) ； adhesion ； ploughing ； coefficient of friction (COF) ； stick-slip

參考文獻

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