微奈米磨潤下金屬材料磨耗行為之研究

Study on Wear Behavior of Metal Materials in Micro/Nano-Tribology

簡依玲(Yi-Ling Jien)

指導教授 ： 于劍平

崑山科技大學/工程學院/機械工程研究所/碩士(2005年)

https://doi.org/10.6828/KSU.2005.00070

摘要

近年微奈米技術的快速發展，使得薄膜製程技術開始受到重視，釵h薄膜及微結構材料也日益廣泛運用。再者相關的研究也需要薄膜材料性質來作分析之依據，因此微奈米尺度下的材料性質量測就日益重要。微奈米尺度下之機械性質與一般巨觀時差異甚大，因此一般傳統性質量測方法並不適用於薄膜與奈米結構之元件，故必須使用新的量測方法，以得到所需微奈米尺度下之材料性質。本研究針對金屬材料之奈米磨潤性質進行實驗，利用奈米性質測試儀(NanoTest)量測金屬材料之奈米磨潤性質，以銷對盤(Pin-On-Disc，POD)磨耗的方式來進行奈米磨潤性質實驗，對工件材料、施加負荷、轉速及旋轉半徑距離等之實驗參數，來做不同金屬材料奈米磨潤之實驗分析，並且比較各材料之磨潤型態。經本文之發現：奈米磨潤實驗中，四種材料可分為三個階段，在一開始施加負荷較小時，平均摩擦係數較不穩定，使得施加負荷與平均摩擦係數對應曲線差異較大，且其值較高；施加負荷漸漸增加後，平均摩擦係數值會趨近穩定，其曲線平穩且其值較小；而當施加負荷在持續增加，平均摩擦係數則會開始漸漸變大，其曲線呈線性。而平均摩擦係數之大小排列以，鋁材及銅材延性佳之材料最大，鈦材次之，鍍鉻薄膜最小。而於磨痕形貌觀察上，鋁材的磨痕邊緣會出現翹曲與碎屑，並有磨潤黏附之現象產生。銅材的磨痕邊緣上，則會出現層狀破裂形貌與顆粒碎屑。鈦材磨痕形貌類似溝槽，無磨潤黏附現象，碎屑極少。鍍鉻薄膜磨痕形貌則會受底材性質之影響，當施加負荷大時，使得鉻膜破裂而使探頭刮至玻璃基材，磨痕旁之薄膜會出現裂痕與噴出的碎屑。

關鍵字

奈米磨潤 ； 微磨耗 ； 磨痕寬度 ； 摩擦係數 ； 銷對盤

並列摘要

The technology of thin film materials is more and more important and the application areas are more and more extensive, because the development of micro/nano technology is very fast. And the micro/nano structures and thin film materials are more and more important. Furthermore, tribology research is often based on thin film material properties analysis. However, the material properties have great differences between micro and nano-scale measurement. We can directly use micro-scale material properties in nano-scale measurement. Therefore, we must re-design the method of experimental measurement, and then the nano-scale material properties are obtained.

In this investigation, the NanoTest was employed to measure the material properties of nano-tribology. Furthermore, the factors that affect the metal material properties of nano-tribolgy and the wear appearance of metal materials are also discussed. With the NanoTest, the Pin-On-Disc is used to measure the properties of nano-tribology. The four factors are specimen material, applied load, revolved speed, and revolved radius.

Analyzed results show that four metal materials all have three parts in the diagram of COF-applied load curve. When the applied load is less, the difference in the curve of applied load and COF is to more, and the value of COF is higher and unsteady. When the applied load is increased, the curve of COF is steady, and the value of COF is steady and less trending. When the applied load is increased continuing, the curve of COF is liner, and the value of COF is less trending. Al and Cu are ductility materials. Therefore, the value of COF is more than others. And the next is Ti, and the last is Cr film. The results of appearance of the scratch are shown that Al properties of nano-tribology have adhesion phenomena, it will produce the debris shaped like a roll on the side of the scratch. Cu properties of nano-tribology have granule and lays on the side of the scratch. Ti properties of nano-tribology have a few granule and no adhesion phenomena, it produce the appearance like furrows. Cr film properties of nanotribology have substrate effects, the micro-crack will be produced on the surface of thin film, because the diamond pin has scrape substrate of the glass, if the load is over for the thin film material.

並列關鍵字

Nano-tribology ； Pin-on-Disc(POD) ； coefficient of friction(COF) ； micro wear ； width of scratch

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