- 學位論文
鉻金屬膜於奈米磨潤下磨耗現象之研究
Study on Wear Behavior of the Chromium Metal Thin Film under Micro/Nano Tribology
摘要
本研究主要是利用表面處理，鉻膜濺鍍於基材之製程技術探討。利用Excel軟體比較鍍鉻膜的特性。最近幾年，金屬鍍膜製程技術在台灣的快速發展速度，許多薄膜及微結構材料也日益廣泛運用。 研究方向針對鉻膜製程技術濺鍍於基材料上，進行磨潤性質實驗，以銷對盤(Pin-On-Disc，POD)磨耗實驗探討鉻膜濺鍍於基材上磨潤之實驗分析，並且比較材料之磨潤型態。使用掃描式電子顯微鏡 (scanning electron microscope, SEM)作探討，並且利用Excel分析探討實驗結果數據，針對同材料不同參數、同參數不同材料作對照與分析研究之後，進一步探討評估，是否能將分析數據運用於材料的磨耗，另一方面可作為建立材料特性鍍膜後的特性、利於未來材料研究之參考。 將鉻薄膜塗佈在基材上，可大大改善切削工具和耐磨工件的性質及壽命，並可以提升國家科技業的競爭優勢。
並列摘要
This research is mainly probing into the surface treatment of processing technology of coating thin film on the materials with different kinds of chromium films and comparing the coating characteristic of chromium films by the Excel software. The technology of processing of coating film on the metal materials was developed speedily in Taiwan recently. The applications of thin films and microstructural materials are also more and more widespread. Direction of this research is viewing the process of sputtering chromium film on the material. Discussing and analyzing the experiment of sputtering chromium metal film on the materials by using Pin-On-Disc (POD) and electron microscope (SEM), also comparing the wearing conditions on each material. The experiment result data are analyzed with the Excel software. After making the comparison between same material with different parameter and different material with same parameter, the research went further to estimate if these analysis data could be use in material wear. On the other hand, the establishment of materials behavior on the attribution of coating could be reference for future material research. Coating the chromium thin film on the materials might greatly improve the durability of cutting tool and the properties and also might promote the competitive advantage of technology industry in national science.