動態摩擦帶電機制應用於流量感測之研究

Studies on the dynamic tribo-electrification mechanisms for micro flow sensor

呂純怡(Chun-Yi Lu)

指導教授 ： 周煥銘

崑山科技大學/工程學院/機械工程研究所/碩士(2004年)

https://doi.org/10.6828/KSU.2004.00023

摘要

本論文最初係以實驗方式研究三種貴金屬分別與鉑組成之微細熱電偶應用於微小穩態流量之感測。當氣體流量小於1000 cc/min且量測時間在1秒以內，則使用靜態微細熱電偶感測微小穩態流量是可行的。並且，微細熱電偶之材料比熱愈小則對於氣體流量之感測將會愈靈敏。
再者，利用上述靜態微細熱電偶之研究結果，進一步以動態的金屬表面摩擦帶電機制來研究穩態流量之感測。在此，係以實驗方式探討銅及鉛分別與鐵組成之動態熱電偶(Cu/Fe, Pb/Fe)應用於流量之感測。研究發現當氮氣流量小於50 l/min時，摩擦帶電之電位對於流量之感測相當靈敏。並且，熱起電力較大且不互溶之金屬配對(如Pb/Fe)，其動態的表面摩擦帶電機制將可應用於開發各種形式之流量感測器。

關鍵字

微熱電偶 ； 流量感測 ； 動態熱電偶 ； 摩擦帶電機制 ； 穩態

並列摘要

The micro-thermocouples of Cu/Pt, Ag/Pt and Au/Pt for the micro steady flow sensors are studied experimentally in this paper. Experimental results show that when the micro flow rate is less than 1000 cc/min and the experimental time is within 1 s, it is suitable to measure the micro steady flow by the micro-thermocouple. Furthermore, it becomes much higher sensitivity with lower specific heat of the micro-thermocouple.
Moreover, according to the above experimental results, the dynamic tribo-electrification mechanisms between the metal interfaces can be used to study the micro steady flow sensor. The dynamic thermocouples of Cu/Fe and Pb/Fe for the flow sensors are studied experimentally in this paper. Experimental results show that when the flow rate of N2 is less than 50 l/min, it is suitable to measure the flow rate by the dynamic thermocouple. Furthermore, it becomes much higher sensitivity with the metal pairs of higher thermo-electrification voltage and lower relative mutual solubilities (Pb/Fe, for example). From the experimental results, the studies on the dynamic tribo-electrification mechanisms between the metal surfaces can be applied to develop the flow sensors

並列關鍵字

flow sensor ； micro-thermocouple ； steady ； tribo-electrification mechanisms ； dynamic thermocouple

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