黑色樹脂材料做黑色矩陣之製程參數對彩色濾光片應用的影響

Effect of processing parameters for black matrix with black resin on its properties in color filter application

鄭志朋(Chih-Peng Cheng)

指導教授 ： 張慎周

崑山科技大學/工程學院/電機工程研究所/碩士(2006年)

摘要

傳統彩色濾光片之黑色矩陣，系由玻璃基板濺鍍鉻金屬後，予以蝕刻圖案才完成，此方法需采買昂貴真空濺鍍設備，且六價鉻已被歐盟於2006七月開始實施之有害物質管製指令(Restriction of Hazardous Substances;RoHS)列為管製的項目使得黑色樹脂因環保及成本考量，成為新設彩色濾光片生產線趨勢。
由本文中可知黑色樹脂具有鉻之低反射與高遮光特性亦可簡化製造流程提高生產力與降低不良率及成本，且於實驗中知黑色樹脂之塗佈參數對膜厚、光學密度之影響﹔並了解曝光源與光阻解析度之關係變化，且知光阻隨著顯影時間增長而產生剝落現象﹔黑色樹脂運用與塗佈技術之更新為現今彩色濾光片之重大突破亦成為黑色矩陣製作之主流。

關鍵字

黑色矩陣

並列摘要

The black matrix used in traditional color filter is produced with chromium and its oxide and nitride material. It is usually made by sputtering and followed by etching process. The process needs expensive vacuum system, and chromium is hazardous to environment. Therefore, black resin is the new selection for black matrix material in newly built color filter production line.
This study introduces a series of processing parameters in black matrix production with black resin: spinning speed versus film thickness and optical density; exposure light source versus pattern resolution. It was also found the patterned film begins to peel if the developing time taking too long during lithography.

並列關鍵字

black matrix

參考文獻

[7] 邱偉倫、黃振球，“不同注入口對液晶分子配向的影響應用於 TFT-LCD製程的研究”，元智大學化學工程研究所。

[14] 蔡政峰、張慎周，“退火製程對鉻及氧化鉻薄膜之蝕刻影響”，崑山科技大學電機研究所。

[18] Kurt E. Peterson，“Dynamic Micromechanics on Silicon: Techniquesand Devices”， IEEE Transactions on Electron devices，Vol 25, No.10, 1978，1241-1250。

[23] Hong Xiao，“Introduction to Semiconductor Manufacturing Technology” Pearson Education Taiwan Ltd。

[27] 謝盛祺、張慎周，“厚膜光阻AZ4620之最佳化製程在微機電上應用”，崑山科技大學電機研究所。