DC磁控濺鍍沈積氮化鈦/氮化鉻磨耗性質之研究

An investigation of wear properties of TiN/CrN films deposited by reactive magnetron sputtering

黃智偉(Jr-wai Huang)

指導教授 ： 劉見成

崑山科技大學/工程學院/機械工程研究所/碩士(2007年)

https://doi.org/10.6828/KSU.2007.00066

摘要

本實驗採用分離式靶材的方式，薄膜製備是利用鈦、鉻靶材和高純度氮氣於真空度為5 ×10-6torr下反應沈積氮化鈦/氮化鉻薄膜。模具鋼SKD11為基材，探討模具鋼SKD11經沉積氮化鈦/氮化鉻薄膜後，不同層數對表面結構、及機械性質之影響。
由實驗結果分析顯示，氮化鈦/氮化鉻多層薄膜結晶性會隨著層數增加而增加，繞射峰有TiN及CrN的結晶相，其TiN結晶相分別由(320)、(200)平面成長，而CrN結晶相 (110)、(020)、(200)平面成長，主要繞射峰在TiN(320)強度最強。機械性質明顯提昇，可有降低摩擦係數，延長材料之使用壽命且具有較好的抗磨耗性能。又恆溫一小時500℃退火後氮化鈦/氮化鉻64層多層膜，有最好的抗磨耗性。

關鍵字

DC磁控濺鍍 ； 退火 ； 氮化鈦/氮化鉻多層薄膜

並列摘要

A method named the separation target is adopted for this experiment. The films in this study are prepared by using a Cr and nitrogen gas at 5*10-6torr for CrN films and Ti target for TiN coatings. The steel substrates (SKD11) are set as a base. This study can therefore discuss the effect of depositing the Cr and nitrogen gas on TiN/CrN films as follows: what the different mutilayers influence the surface structure and mechanical properties is.

According to the result of the analysis in this experiment, TiN/CrN multilayers cause the crystallization of the films. The peaks on TiN and CrN present polycrystalline. Among these two peaks, TiN peak by (320) and (200) flatly grows and CrN peak by (110) (020) and (200) also flatly grows. The highest orientation stands on TiN (320) Consequently, the mechanical properties have been obviously enhanced, decreasing the coefficient of friction, extending the endurance of using materials, and having a better anti to wear and tear. At annealing at 500℃ one hour later, there are 64 TiN/CrN mutilayers owning their best anti to wear and tear.

並列關鍵字

and annealing ； DC reactive magnetron sputtering ； TiN/CrN muti-films

參考文獻

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