多層氮化鋁鈦/氮化釩奈米薄膜的磨耗及機械性質之研究

An investigation of wear and mechanical properties of nano-multilayered TiAlN/VN films

蔡明璟(Min-Ching Tsai)

指導教授 ： 劉見成

崑山科技大學/工程學院/綠色材料研究所/碩士(2010年)

https://doi.org/10.6828/KSU.2010.00036

摘要

本研究是利用直流磁控濺鍍沈積氮化鋁鈦/氮化釩多層薄膜於模具鋼(SKD11)，以改善模具鋼磨耗抗磨耗性質。薄膜製備是利用鋁鈦、釩靶材和高純度氮氣於真空度為5×10-6 torr下反應沉積氮化鋁鈦/氮化釩薄膜。薄膜的性質分析使用X光繞射分析，薄膜的硬度及楊氏係數分析使用奈米壓痕，薄膜表面型態分析使用掃描式電子顯微鏡(SEM)及原子力顯微鏡(AFM)，薄膜厚度量測使用探針式表面輪廓儀器分析，薄膜之磨耗分析是利用迴轉式銷對盤磨耗試驗(pin-on-disk)。
結果顯示，在機械性質方面，硬度值、楊氏係數、摩擦係數有隨著層數增加而越好的趨勢，當氮氣流量5sccm層數為64層時，最高硬度值可達25.475GPa，最高楊氏係數為221.5GPa，薄膜表面之結構較為緻密，孔洞相對減少，表面呈圓粒狀組織，而磨耗測試，有最低摩擦係數0.65。

關鍵字

氮化鋁鈦/氮化釩多層薄膜 ； 直流磁控濺鍍 ； 硬度

並列摘要

In this study, TiAlN/VN multilayers on steel substrates(SKD11) are produced using DC magnetron sputtering process. These films are prepared by using a TiAl target、V target and nitrogen gas at 10-6torr for TiAlN/VN coatings. The multilayer obtained are characterized in composition by means of X-ray diffraction (XRD) techniques.The multilayer microhardness and adhesion to the substrate were studied by atomic force microscopy (AFM). The morphological analysis and coating structure ere studied using scanning electron microscopy (SEM), and atomic force microscopy. The film thickness is measured by a stylus profiler (XP-2 stylus profiler). The friction and wear characteristics TiAlN/VN multilayer will have been studied by using pin-on-disk tester with steel ball.
The results of mechanical properties, hardness、Young，s modulus and friction coefficient Values increase for different layers number.Nitrogen flow rate 5sccm、64layers with the highest microhardness of 25.475Gpa，the highest Young，s modulus of 221.5GPa. Thin film surface of the structure is relatively dense and relatively less holes in the surface, cylindrical granular organization.After the pin-on-disk test wear test, found the best friction coefficient of 0.65.

並列關鍵字

TiAlN/VN multilayers ； DC reactive magnetron sputtering ； Hardness

參考文獻

[1] S. J. Bull, and A. M. Jones, “Multilayer Coatings for Improved Performance”, Surf. Coat. Technol., 78, 173-184 (1996).

[2] W. –H. Soe, and R. Yamamoto, “Mechanical Properties of Ceramic Multilayers: TiN/CrN, TiN/ZrN, and TiN/TaN”, Materials Chemistry and Physics, 50, 176-181 (1997).

[3] H. Holleck and V. Schier, “Multilayer PVD Coatings for Wear Protection”, Surf. Coat. Technol., 76-77, 328-336 (1995).

[4] K. H. Habigetal,“Chemical Vapor Deposition and Physical Vapor Deposition Coatings：Properties, Tribological Behavior, and Applications”, J. Vac. Sci. Technol., A4(6), Nov/Dec, (1986), p.2832-2843.

[6] S. A. Barnett, A. Madan, L. Kim, and K. Martin, “Stability of Nanometer-Thick Layers in Hard Coatings”, MRS Bulletin/March, 169-172 (2003).