有機發光二極體元件隔離層最佳化製程研究

本研究是針對有機發光二極體元件之隔離層最佳化製程。由於OLED在施加電壓時，在其導通電流下會產生有機薄膜與ITO界面之間的邊緣效應，其漏電流會造成不必要的功率耗損。為使有機發光二極體的元件能更趨於穩定及達到最佳的發電效率，以避免電流流失太多的關係，故必須藉由隔離層去區隔出鋁層與ITO電極的直接接觸。為使隔離層能達到導角(Taper)的產生，本研究探討透過各種不同的參數條件來檢證最佳化導角製程條件。考量設備間存在著機台差異性之問題，為確認設備亦能製作出有效之導角，便依據隔離層廠商所提供之參數表為基準，將可變因子縮減至曝光光罩材質、曝光時間、Hard bake溫度、時間與Filter有無等製作條件來確認何種條件可得到導角。得到最佳化製程後，以該條件再確認元件間之隔離層與ITO邊緣效應，確實有降低漏電流，提升效率。

關鍵字

有機發光二極體；有機薄膜；導角製程；絕緣層；陰極隔離層

並列摘要

This research aimed to process optimization of isolating layer in organic light-emitting diodes(OLED). When voltage applying on OLED device, circuit current of edge effect on the interface between organic film and ITO layer happens and causes undesirable power loss resulted from leakage current. In order to improve the stability and current efficiency of OLED, using isolating layer to separate aluminum layer and ITO electrode is essential. To obtain taper on the isolation layer, process optimization of taper was evaluated by several parameters. Based on parameter chart provided by isolating layer vendor, variables of photolithography mask material, exposure time, hard-bake temperature and time and usage of filter were examined to eliminate the deviation between different machines and most importantly to produce taper. Eventually, we confirmed the edge effect between ITO layer and isolating layer acquired by the optimized process. Leakage current decreased and successfully improved the OLED device efficiency.