以聚焦離子束寫製法與微模轉印製程在D型光纖上製作布拉格光柵

Using Focused Ion Beam and Micro-Mold Transfer Printing Process to Fabricate Bragg Grating on D-Shaped Optical Fiber

陳皇志(Huang-Jr Chen)

指導教授 ： 何智廷

國立虎尾科技大學/工程學院/機械設計工程研究所/碩士(2014年)

摘要

本研究主要說明如何研磨D型光纖之技術，與使用聚焦離子束(Focused Ion Beam：FIB) 寫製法、微模轉印製程製作出D型光纖布拉格表面光柵濾波元件，研究中先將多模光纖製作成研磨試片並對試片進行單邊研磨(Side-Polished)且精確的研磨拋光至光纖纖芯，接著使用聚焦離子束寫製法在與Ｄ型光纖尺寸接近的長方型矽晶體上寫製光柵；再利用高分子材料h-PDMS與PDMS所組成的複合模複製其光柵結構特徵，最後運用微模壓印技術將光柵特徵精確複製於D型光纖研磨面上；研究中成功製作出以微模轉印法製作出來的D型光纖布拉格光柵濾波元件，並使用光學顯微鏡(Optical Microscope:OM)、掃描電子顯微鏡 (Scanning Electron Microscope:SEM) 的樣品表面高解析度圖像功能觀察表面結構，以及原子力顯微鏡（Atomic Force Microscope:AFM）量測光柵結構的週期與深度，光學傳輸特性以寬頻光源(Amplified Spontaneous Emission:ASE)與光纖極化器從光頻譜分析儀(Optical Spectrum Analyzer:OSA)測量實驗之結果。

關鍵字

聚焦離子束寫製法 ； 微模轉印技術 ； D型光纖布拉格光柵

並列摘要

This research is to study D-shaped optical fiber grinding technology, combined with a focused ion beam (FIB), and micro-molding transfer printing process to fabricate a D-shaped optical fiber Bragg grating filter. By this method, we can fabricate a low loss transmission D-shaped optical fiber grating filter. The results use an optical microscope (OM) and scanning electron microscope (SEM) to observe the surface structure of the grating on the d-shape optical fiber, its period and depth of grating is observed by atomic force microscope (AFM), and the results of optical transmission characteristics are measured and shown by amplified spontaneous emission(ASE) broadband light source and in-line optical fiber polarizer though optical spectrum analyzer(OSA).

並列關鍵字

Focused ion beam ； Micro-mold transfer printing ； D-shaped optical fiber bragg grating

參考文獻

[21] 林志強, “可調式D型光纖布拉格表面光柵濾波元件之研製”,南台科技大學電子工程研究所,2007/07.

[23] 陳俊淇、謝健, “電子束/聚焦離子束雙束系統應用介紹”,國家奈米元件實驗室,2008.

[1] M.-H. Chiu, S.-N. Hsu, H. Yang, “D-type fiber optic sensor used as a refractometer based on total-internal reflection heterodyne interferometry,” Sensors and Actuators B, 101, pp. 322-327, 2004.

[2] Gang-Chih Lin, Likarn Wang, C. C. Yang, M. C. Shih, and T. J. Chuang,“Thermal Performance of Metal-Clad Fiber Bragg Grating Sensors”, IEEE Photonics Technology Letters, Vol 10, No.3, March 1998.

[4] Blodgett K. B., 1939, “Use of Interference to Extinguish Reflection of Light From Glass”, Phy. Rev.55, 391.