平面波導光柵上導光層厚度對濾波器之影響

The optical layer thickness effect of planer waveguide filter with Bragg grating

陳禎瑞(Jen-ruei Chen)

指導教授 ： 李安謙

共同指導教授 ： 何智廷(Chi-Ting Ho)

國立虎尾科技大學/工程學院/機械與機電工程研究所/碩士(2009年)

摘要

本論文主要研究導光層厚度對平面波導濾波器之影響。在此研究中，將以全像術干涉技術和微模轉印技術在高分子上製作光柵結構。此次平面波導光柵結構與以往不大一樣，以往打出的雷射光點為圓形，這次改變了反射角度，使光點打出來變成一直線的，將製程改變得更加簡單方便也使原本要打許多點的方式如今也只要打一點便能達到。光柵先在正光阻上藉由微影製程形成，在將其轉印到PDMS模仁上；在這步驟之後，將以PDMS高分子濾波器的模型(pattern)轉印至高分子上。在高分子上元件得以保存較長的時間且此翻模技術可達到大量生產的效果及製作出低損耗的高分子光波導元件，其光學傳輸特性可由Tunable Laser頻譜分析儀所量測得知。研究中以原子力顯微鏡(AFM)、掃描式電子顯微鏡(SEM)與光學量測等方法觀察與紀錄實驗之結果，並研究探討。

關鍵字

平面波導 ； 全像術干涉 ； 導光層

並列摘要

This thesis is to study the effect of the thickness of the guiding layer on the planar waveguide. In this thesis, a procedure for fabricating a high aspect ratio periodic structure on a UV polymer at submicron order using holographic interferometry and molding processes is described. First, holographic interferometry using a laser was used to create the master of the periode line structure on an i-line sub-micron positive photoresist film. Final line pattern on a UV polymer was formed from casting against the master mold. Finally, a different thickness of SU8 polymer was spun on the polymer grating to form a planar waveguide. The optical transmission characteristics were measured in terms of Tunable Laser spectrum analyzer. The grating profiles of the devices were observed using SEM and AFM system.

並列關鍵字

planer waveguide ； holographic interferometry ； guiding layer

參考文獻

[1] M. H. M. Klein Koerkamp, M. C. Donckers, B. H. M. Hams, and W. H. G. Horsthuis, “Design and fabrication of a pigtailed thermo-optic 1x2 switch,” Proc.

Integrated Photonics Research Conf., vol. 3, 1994, pp. 274-276.

[2] L. Eldada, and L. W. Shacklette, “Advances in polymer integrated optics,” Journal of selected topics in quantum electronics, vol. 6, 2000, pp. 54-68.

[3] H. Nishihara, Masamitus Haruna and Toshiaki Suhara, Optical Integrated Circuites, McGraw-Hill Company, Inc.,2001.

[4] T. C. Sum, A. A. Bettiol, J. A. van Kan, F. Watt, E. Y. B. Pun, and K. K. Tung, “Proton beam writing of low-loss polymer optical waveguides”, Appl. Phys. Lett. 83, 1707 (2003)