本論文主要針對壓電微動平台設計追跡控制器。壓電致動器的非線性現象主要是受磁滯現象所影響,本論文首先採用Prandtl-Ishlinskii(PI)模型來描述壓電致動器的磁滯現象,利用最小平方演算法識別出磁滯模型的權重值,再利用此模型求出其逆模型以前饋控制器來補償,最後利用自調式類神經PID控制器來消除建模誤差。實驗驗證方面,在PC-based壓電控制平台架構下,利用前饋控制器與閉迴路結合自調式類神經PID控制器進行定位控制。
The propose of this study is to design a tracking controller for micro-piezoelectric motion platform. The hysteresis effect is the piezoelectric actuated platform provided nonlinear behavior. A Prandtl-Ishlinskii model is constructed to describe the hysteresis behavior of piezoelectric actuators. The weights of hysteresis model are identified by using LMS(Least-Mean-Square) algorithm. Based on the Prandtl-Ishlinskii model, a feed-forward controller is developed for compensate for the hysteresis nonlinearity. A self-tuning neuro-PID controller is introduced to suppress the tracking error due to the modeling inaccuracy and hence to get precision tracking error. The developed approaches are numerically and experimentally verified which demonstrate performance and applicability of the proposed designs under a variety of operating conditions.