XXY精密對位平台控制器設計

Design of XXY Precision Alignment Motion Controller

吳昱伸(Yu-Shen Wu)

指導教授 ： 陳柏宏

國立虎尾科技大學/電機資訊學院/電子工程系碩士班/碩士(2014年)

摘要

本論文改良傳統的運動控制系統，提出一個用於XXY精密對位平台的客製化運動控制器，取代原本系統中的泛用型運動控制器，大幅降低此系統的成本，並將逆向運動學參數寫入本論文的運動控制器中。另外運動控制器可與電腦軟體搭配操作平台。此系統先由影像對位程式計算目前影像與原始影像的誤差距離，電腦端的程式經由USB輸出運動控制指令給運動控制器，解析出對位平台的移動座標、移動速度、加減速度、移動方向等參數。藉由這些參數計算相對的控制脈波給馬達驅動器，來驅動XXY精密對位平台來修正座標。此控制器同時也具備手轉輪的輸入介面，藉著控制器上的編碼器可以對平台做六種微調模式，分別為X、Y、θ座標軸與M1、M2、M3馬達微調。

關鍵字

XXY精密對位平台 ； 運動控制器 ； 影像對位

並列摘要

The thesis proposes a customized motion controller for XXY precision alignment stage to improve the traditional motion control system. The controller replaces the general motion controller so as to greatly reduce the system cost, and the inverse kinematic parameters of the stage can be hidden within the proposed motion controller. In addition, the motion controller can operate the stage with the PC program.
The system detects the displacement between the region of interests (ROIs) of original image and current image by using the proposed PC image servo program, and then the program output the motion control commands to USB interface of the motion controller. Subsequently, the parameters, motion coordinate, motion velocity, acceleration/deceleration, and motion direction are parsed by the program. The parameters are used to calculate the correspondent control pulses and output them to the motor drivers, so as to move the XXY precision alignment stage to the target position. There is also an interface of handwheel pulse-encoder in the controller, which can be used to fine-tune the position of XXY stage with the six different modes, including respectively fine-tuning of coordinate X, Y, θ as well as motor M1, M2, and M3.

並列關鍵字

XXY precision alignment ； Motion controller ； image registration

參考文獻

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