本論文提出一個針對XXY精密對位平台設計的運動控制系統。此控制系統包括了個人電腦、泛用運動控制軸卡、專屬脈波輸入型運動控制器、手轉輪脈波產生器、三組馬達驅動器以及三組極限遮光感測器。此控制系統是從電腦端透過USB介面將XXY精密對位平台的(X,Y,θ)對位座標傳送至泛用運動控制軸卡。泛用運動控制軸卡再將之轉換成(X,Y,θ)對應極性與等量脈衝信號,並傳輸至我們以微處理機為基礎所設計的專屬脈波型運動控制器。此控制器根據XXY精密對位平台的逆向運動學方程式計算給三個馬達驅動器輸入介面的方向與步進脈衝信號,並傳送至馬達驅動器驅動XXY精密對位平台各軸上的馬達。另外,手轉輪脈波編碼器可用來產生代表X,Y,或θ的校正座標或X1,X2,或Y各軸馬達的校正位移編碼波形。
This thesis proposes a motion control system for XXY precision alignment stage. The control system consists of a personal computer, a generic motion control card, a dedicated pulse-input type motion controller, a handwheel pulse encoder, three motor driver, three stepper motors, and three limit sensors. The PC user-interface transmits a alignment coordinate (X,Y,θ) to the generic motion control card via USB interface. The motion control card then generates a corresponding polarity pulse and equivalent step pulses of (X,Y,θ), and transmits them to the microprocessor-based dedicated pulse-input type motion controller designed by us. The motion controller calculates a direction and step pulses for the input interface of the three motor drivers according to the inverse kinematics equations of the XXY precision alignment stage, and then the motor driver drives the motor on each axis of XXY precision alignment stage. In addition, the handwheel pulse encoder generates encoding pulse shapes representing manual calibration coordinate X, Y, θ, or manual calibration displacement of each axis X1, X2, or Y, respectively.