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  • 學位論文

以微模轉印法在D型光纖上製作高分子微透鏡

Using The Micro Mold Method to Fabricate Polymeric Microlens on The D-type Optical Fiber

指導教授 : 何智廷
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摘要


本研究為研發一新的方法,在D型光纖上製作微透鏡,我們採用近軸光學及波動光學繞射理論作為雷射與光纖耦合數學模型,根據此模型,可以計算出光耦合效率。 其製作過程我們先以負光阻SU-8於玻璃上製作出橢圓柱陣列,然後使用熱熔法加工得到凸透鏡,再使用PDMS旋轉塗佈在玻璃上的凸透鏡陣列中,翻模成為凹透鏡,最後使用微模轉印法將圖案轉至OG146(折射率為1.51237)上,得到最後凸透鏡。 為改善雷射與單模D型光纖彼此間模態不匹配,以增加其光耦合效率,希望藉由一新式製作微透鏡製程,使用微模轉印法製造出兼具量產、重現性高,可提高光耦合效率之光纖微透鏡製程。

關鍵字

微透鏡 D型光纖 耦合效率

並列摘要


A new method for fabricating microlens on the D-type optical fiber is proposed in this research. A scalar diffraction analysis is used to calculate the coupling efficiency. First, the negative photoresist SU-8 is used to fabricate Oval microchannel array and the thermal reflow method is used to get a convex lens mold. Next, The PDMS is used to transfer the mold shape to OG146 . By this method, we can improve the optical coupling efficiency between the laser and the D-type optical fiber mode.

參考文獻


[1] Z. D. Popovic, R. A. Sprague, and G. A. N. Connell,“Technique for the monolithic fabrication of microlens arrays,” Applied Optics, 27, pp.1281-1284, 1988.
[2] M. C. Hutley, “Optical techniques for the generation of microlens arrays,” Journal of Modern Optics, 37, pp. 253-265, 1990.
[3] C. S. Lee and C. H. Han, “A novel refractive silicon microlens array using bulk micromachining technology,” Sensors and Actuators A, 88, pp.87-90,2001.
[4] W. R. Cox, “Micro-optics fabrication by ink-jet printing,” Optics & Photonics News, pp.32-35,2001.
[6] S. K. Lee, K. C. Lee and S. S. Lee, “A simple method for microlens fabrication by the modified LIGA process,” Journal of Micromechanics and Microenginering, 12, pp. 334-340, 2002.

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