以微模轉印複製製程在D型光纖上製作高解析度週期結構

Fabrication of high resolution periodical structure on D-shaped optical fiber by using a replication method

吳世楨(Shin-Jen Wu)

指導教授 ： 何智廷

共同指導教授 ： 李安謙(An-Chen Lee)

國立虎尾科技大學/工程學院/機械與機電工程研究所/碩士(2009年)

摘要

本研究提出D 型光纖的研磨技術，並結合黃光微影製程(Photolithography)、光學全像術干涉微影(Holographic Interference Lithography)技術、微模轉印技術，製作出D 型光纖布拉格表面光柵濾波元件。

首先以多模光纖製作成研磨試片後，進行試片單邊研磨(Side-Polished)，其精確的研磨拋光直到光纖纖芯為止。下一步進行黃光微影製程與光學全像干涉微影技術，來製作繞射光柵濾波元件；利用旋轉塗佈正光阻，將短週期布拉格表面光柵曝光於玻璃基板上，並且以此繞射光柵元件利用PDMS做為轉印的特徵。

最後我們將以微模轉印技術，將光柵特徵精確複製於光纖研磨面上 。研究中我們將可完成製作出以微模轉印複製之D型光纖光柵濾波元件，其光柵週期與深度可由原子力顯微鏡(AFM)觀察，及光學傳輸特性可由ASE寬頻光源與光纖極化器利用光頻譜分析儀(OSA)等測量與紀錄實驗之結果。

關鍵字

D型光纖 ； 全像術干涉 ； 微模轉印技術

並列摘要

In this project, we proposed a method to fabricate a D-shaped optical fiber of Bragg surface grating filter component by D-shaped fiber polishing along with photolithography、holographic interference lithography technologies and micro-molding process.

First , we will do side-polished on multi-mode fiber. It will precisely stop polishing until it reaches the core of fiber. Next, we will fabricate the diffraction grating filter component through photolithography process and holography interference lithography. It utilizes spinner to spin coating photoresister , and then the positive photoresist on D-Shaped fibers short periodic Bragg surface grating will be fabricated on glass substrate and as a diffraction grating element the use of PDMS as the transfer characteristics.

Finally, we accurately reproduce the characteristics of the grating on the surface of optical fiber by using micro-molding process. By this method, we can fabricate a low loss transmission whole fibered D-shaped optical fiber grating filter. Its period and depth of grating is observed by atomic force microscope (AFM), and the results of optical transmission characteristics are measured and shown by ASE broadband light source and in-line optical fiber polarizer though optical spectrum analyzer(OSA).

並列關鍵字

D-shaped fiber ； holographic interference lithography ； micro-molding process

參考文獻

[1] Gang-Chih Lin, Likarn Wang, C. C. Yang, M. C. Shih, and T. J. Chuang,“Thermal Performance of Metal-Clad Fiber Bragg Grating Sensors”, IEEE Photonics Technology Letters, Vol 10, No.3, March 1998.

[2] Kevin P. Chen, Ben Mcmillen, Michael Buric, Chuck Jewart, and Wei Xu, “Self-heated fiber Bragg grating sensors,” Appl. Phys. Lett. 86, 143502, 2005.

[3] H. Nishihara, Masamitus Haruna and Toshiaki Suhara, Optical Integrated Circuites, McGraw-Hill Company, Inc., 2001.

[4] Alan D.Kersey, Michael A.Davis et al. “Fiber Grating Sensors,” J.Lightwave Technol., 15(8), p1442, 1997.

[5] K.O.Hill and Gerald Meltz, “Fiber Bragg Grating Technology Fundamentals and Overview,” J.Lightwave Technol., 15(8), p.1263, 1997.