六自由度壓電微動平台量測系統開發

Development of A Six-DOF Measurement System for Piezoelectric Micro-Stage

莊國元(Guo-Yuan,Jhuang)

指導教授 ： 鄭旭志

共同指導教授 ： 劉建宏(Chien-Hung Liu)

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2012年)

摘要

近年隨著奈米技術的成熟，精密量測與控制技術對於高精密加工製造，是一項不可或缺的重要關鍵。奈米級的量測上，利用四象限感測器(QPD)與透鏡，即可形成一組二維量測模組，將多個模組配合幾何位置的擺設，即可構成自由度更高的量測系統。其系統精度高且系統擴張性佳為最大的優點。本研究係整合多組二維光學量測模組構成六自由度量測系統，利用該系統進行回授配合定位控制技術，可實現多軸奈米級的定位控制。
本研究建立了一套平台位置量測系統，此系統可量測移動平台水平與垂直方向的直線度誤差，與俯仰度、搖擺度、滾度動之角度誤差，作平台位移與角度變化的補償。最小解析度X、Y、Z軸10 nm、θx、θy、θz 為0.1 arcsec，可精準定位平台位置。

關鍵字

壓電致動器 ； 多軸奈米平台 ； 雷射量測

並列摘要

Thanks to increasingly mature nano-technology, precise measurement and control technology has become a key indispensable for highly precise process and production. For nanoscale measurement, 2D measuring module can be formed by employing QPD. Several modules configured in consideration of geometric locations construct a measuring system with higher degree of freedom. This study integrates several sets of 2D optical measuring modules to construct a measuring system with 6-degrees freedom, and by using this system to feedback and coordinate the control technology of positioning this study realizes multi-axis nanoscale positioning control.
This study establishes a platform measurement system which compensates platform displacement and angular variation for straightness error of the mobile platform in horizontal and vertical directions, as well as measure angular error of pitching angle, yaw, and roll ability. X, Y, and Z axes have minimum resolution 10nm, while θx, θy and θz have 0.1 arcsec, with which exact position of the platform can be positioned accurately.

並列關鍵字

piezoelectric actuator ； multi-axis nano-platform ； laser measurement

參考文獻

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