工具機單線性軸六自由度量測系統之設計

Design of a Six-degree-of Freedom Error Measurement System for Linear Axis of Machine Tools

林威辰(Wei-Chen Lin)

指導教授 ： 劉建聖

國立中正大學/工學院/機械工程學系/碩士(2014年)

摘要

本論文提出一個新型非接觸式光學量測系統，用於工具機線性軸六自由度誤差量測，相較於市售光學量測儀器，此量測系統可以同時量線性軸六自由度誤差和低成本的優勢。利用ZEMAX光學模擬軟體和歪斜光線追蹤法分別建立量測系統的架構模型，最後再搭配雷射干涉儀的實驗比對，完成此量測系統的功能性驗證。
本論文系統架構茲說明如下：整體量測系統係由一個雷射源、兩個立方體分光鏡、兩個平面反射鏡及三個位置感測器所組成。光路從準直的氦氖雷射光源出發，藉由反射鏡1(Mirror 1)讓光源送至分光鏡(BS1和BS2)，反射的光線分別入射於位置感測器上(PSD A和PSD C)，而穿透的光線經由反射鏡2(Mirror 2)入射於位置感測器上(PSD B)，將反射鏡和分光鏡製作成同動模組，並架設在待測線性軸上進行誤差量測。
根據模擬與實驗結果顯示，本量測系統在位移重複精度為±0.6μm、角度重複精度為±0.2arcsec，而整體量測系統精度在位移為±1μm、角度為±0.2 arcsec。

關鍵字

歪斜光線追蹤法 ； 六自由度 ； 誤差量測 ； 線性軸

並列摘要

In this thesis, a novel non-contact optical measurement system was developed for six-degree-of freedom error measurement of linear axis of machine tools. Compared with the commercial parts of optical measurement instruments, this measurement system can simultaneously measure six-degree-of freedom error and has low cost advantage. The measurement system model was implemented by using the ZEMAX optical design software and methods of skew-ray tracing. Finally, performance verification of this measurement system is compared with a laser interferometer.
In this structure of the prototype, the measurement system consists of a laser sources, two cube beam splitters, two planar mirrors and three two-dimensional position sensitive detectors. The moving module were combination of the beam splitters and the planar mirrors, and then install on measure axis. The light beam passed through Mirror 1, BS1, BS2 and Mirror 2 and then generates three laser beams, these three laser beams are detected by the three position sensitive detectors. The simulation and experimental results show that the measurement accuracy of the system was ±1μm for translational error components, ±0.2 arcsec for angular error components. The system repeatability error was ±0.6μm for translational error components, ±0.2arcsec for angular error components.

並列關鍵字

Six-degree-of freedom ； Error measurement ； Linear axis ； Methods of skew-ray tracing

參考文獻

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