精密機具檢測系統之建立

The Developments of the Performance Measurement System for Precision Machine Tools

徐東暉(Tung-Hui Hsu)

國立虎尾科技大學/工程學院/動力機械工程研究所/碩士(2005年)

摘要

本文提出三套精密機具之檢測系統，包括：三球桿檢測系統、雙讀取頭二維光
學尺檢測系統與光學尺三維檢測系統，檢測精密機具之性能。
三球桿檢測系統是由三套磁性伸縮球桿所構成，球桿可量測兩圓球之間相對位
移量，利用球桿即量測出精密機具主軸與參考點之問的相對位移量，再藉由三角法
(Triangulation Method) 即可消除架設誤差並獲得三維之訊號，以檢測機具之性能。
本系統並具有檢測迅速、低成本、高精度、可獲三軸訊號、檢測特定區域及攜帶方
便等特性。
雙讀取頭二維光學尺檢測系統是結合單個二維光學尺及兩個二維讀取頭所構
成。雙讀取頭可以獲得四個訊號源，再藉由依照特定之規劃路徑量測，即可獲得精
密機具之三軸二十一個誤差值。本系統具有架設簡便、高精度、低成本、檢測快速
及檢測範圍廣等特性。
光學尺三維檢測系統是結合二維光學尺系統及磁性伸縮球桿所構成。本系統是
以 2+1 方式檢測三軸誤差，其中，光學尺系統是藉由兩組於 X-Y 平面上相互垂直
之線性滑軌，用以檢測 X 及 Y 軸，球桿是用以檢測 Z 軸，因此可獲得精密機具之
三維性能。本系統具有可獲三軸訊號、架設簡便、高精度、低成本及檢測快速等特
性。

並列摘要

3 precision machine tools measurement systems, 3-ball bar measurement system,
double readheads planar encoder system and a plane encoder 3-dimensional measurement
system are developed for measuring the performance of precision machine tools.
3 balls bar measurement system is made up of 3 sets of magnetic telescoping bars.
The relative disp lacement between the two balls can be measured by using the ball bar.
By measuring the relative displacement between the precision machine tools spindle and
reference points using ball bars and the triangulation method, setup errors can be
eliminated and 3-dimensional signals can be achieved so as to measure the performance
of measuring machine tools. This system is characterized by fast measurement, low cost,
high accuracy, being able to obtain 3 axis signals, measuring particular areas and being
portable.
Double readheads planar encoder system is the combination of single plane encoder
and two 2-dimensional readheads. Four signals are sampled by using two readheads. The
21 errors of the precision machine tools can be obtained by measuring in accordance with
the calculated model and the various specified test paths. This system is characterized by
being easy to setup, high accuracy, low cost, fast measurement and large measurement
range.
Plane encoder 3-dimensional measurement system is made up of a plane encoder
and a magnetic telescoping ball bar The signals of X axis and Y axis are obtained by
using the plane encoder and the signal of Z axis is obtained by using the ball bar This
system is characterized by its ability to achieve 3 axis signals, setup ease, high accuracy,
low cost and fast measurement.

參考文獻

39. W.Y. Jywe, "The development and application of a planar encoder measuring

學會研討會，國立中山大學機械工程學院，2003 年 11 月。

4. ISO 230-1, Acceptance code for machine tools, Part 1: geometric accuracy of

Standard, 1986.

5. ISO 230-2, Acceptance code for machine tools, Part 2: determination of