微小角度量測及角定位量測系統之研製

Design and Development of Small-Angle-Measurement and Angular-Indexing-Measurement System

李龍添(Lung-Tien Li)

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2005年)

摘要

本論文提出兩種創新的角度量測系統：(1)微小角度量測系統; (2)
角定位量測系統。
對積體電路或相關的半導體產業而言，是需要高精密度之定位系統，
因此在本文中建立具有高精度且多自由度的角度定位系統。本文的量測系
統係應用繞射光學、幾何光學及光槓桿原理所建立的四自由度量測系統。
經實驗證明了這兩種量測系統之可行，實驗結果如下：
1. 微小角度量測系統：
a. 解析度：
δy(Y軸位置誤差)： 0.1 μm
εz(Z軸角定位誤差)： 0.5 sec
εx(X軸偏擺角度誤差)： 1 sec
εy(Y軸偏擺角度誤差)： 0.5 sec
b.不確定性：
δy(Y軸位置誤差)： 0.2 μm
εz(Z軸角定位誤差)： 8 sec
εx(X軸偏擺角度誤差)： 1.6 sec
εy(Y軸偏擺角度誤差)： 0.7 sec
c.工作範圍： 400 sec
2.角定位量測系統：
a.解析度：
δy(Y軸位置誤差)： 0.1 μm
εz(Z軸角定位誤差)： 0.2 sec
εx(X軸偏擺角度誤差)： 0.1 sec
εy(Y軸偏擺角度誤差)： 0.1 sec
b.不確定性：
δy(Y軸位置誤差)： 0.2 μum
εz(Z軸角定位誤差)： 0.7 sec
εx(X軸偏擺角度誤差)： 2.4 sec
εy(Y軸偏擺角度誤差)： 1 sec
c.工作範圍： 360 degree

並列摘要

In this paper, two novel angular measuring systems are developed:
(1) The small Angular measuring system. (2) The indexing measuring
system.
To meet the need of high precision machinery for IC and other
related manufacturing industry, high positioning techniques are required.
Thus, in the thesis, the principle, the design and the performance tests of
the developed measuring systems were represented.
Finally, the verification of the two system were also carried out. The
performance of the systems can be described as followed:
1. The novel small angular measuring system:
a. Resolution:
δy(radiual error in Y axis): 0.1 μm
εz(indexing in Z axis): 0.5 sec
εx(pitch error in X axis): 1 sec
εy(yaw error in Y axis): 0.5 sec
b. Uncertainty:
δy(radiual error in Y axis): 0.2 μm
εz(indexing in Z axis): 8 sec
εx(pitch error in X axis): 1.6 sec
εy(yaw error in Y axis): 0.7 sec
c. Working range: 400 sec
2.The novel indexing measuring system:
a. Resolution:
δy(radiual error in Y axis): 0.1 μm
εz(indexing in Z axis): 0.2 sec
εx(pitch error in X axis): 0.1 sec
εy(yaw error in Y axis): 0.1 sec
b. Uncertainty:
δy(radiual error in Y axis): 0.2 μm
εz(indexing in Z axis): 0.7 sec
εx(pitch error in X axis): 2.4 sec
εy(yaw error in Y axis): 1 sec
c. Working range: 360 degree

參考文獻

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Applied Optics, 9,1930-1933, 1970.