發展一種組合式五自由度之量測系統於CNC工具機上

Developmenet of assemble a multi-degree-of freedom measurement system on a CNC machine tool

謝奇辰(Qi-chen Xie)

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2006年)

摘要

本研究主要在發展一種光路設計整合組合式五自由度的量測系統，包括可應用於單軸或多軸的DVD讀頭角度量測系統來量測長行程平台之角度誤差。
組合式五自由度量測系統包含量測線性位移及直度的微型干涉儀之光路設計包含了微型干涉儀、分光鏡、角隅反射鏡、位置感測器，量測角度誤差的DVD讀頭之角度誤差量測系統包含DVD讀頭、平面反射鏡、光學尺、位置感測器。上述元件可分成基準端與移動端兩部分，一部固定不動在一基準座上，另一部分架在移動平台上。當平台移動時，可透過DVD讀頭加裝的四象限感測器位移讀值加以計算之後可以量測得到滾動度、搖偏角度與俯仰角度誤差，同一時間上最多可以量測兩個角度的誤差，但因架設上方位的不同總計可以量的三個自由度的誤差，並可將其安裝在任何沿運動軸移動的高精密定位平台上。
基於光學系統與對準誤差之精密考量，本文主旨在建立低成本之高精密度角度誤差量測方法，最後並將量測系統安裝在一高精密度X-Y定位平台並進行X或Y運動軸之角度誤差量測，可做誤差校正以及提供即時誤差訊號做動態控制補償之用途。

並列摘要

This paper presents one useful measuring systems for the simultaneous measurement of the DVD pickup motion errors of a moving stage. The system integrates a miniature fiber coupled laser interferometer with the specially designed optical paths and the quadrant detectors, capable of measuring DVD pickup motion errors. Using this model, the proposed measuring method provides rapid and simplicity of setup, and pre-process verification of a linear stage.
The measurement system comprises DVD pickup, reflectors, plane mirrors, laser encoder, quadrant detectors and divided into the fixed part and the moving part. The fixed part will be setup on a reference base, and the moving part will be setup to a moving stage. The displacement, pitch and yaw two errors could be obtained simultaneously by calculating position data from the quadrant detector.
These two measurement systems could be setup on a high precision X-Y stage to measure and calibrate multi-degree-of-freedom errors to feedback the real-time compensation signal for the motion control.

參考文獻

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