微、奈米電極製作與微米陣列孔加工之研究

A study of manufacturing technology of micro-nano electrode and array micro-holes

林正豐(Jeng-Feng Lin)

指導教授 ： 翁豊在

國立虎尾科技大學/工程學院/動力機械工程研究所/碩士(2006年)

https://doi.org/10.6827/NFU.2006.00004

摘要

銅雖具有良好的導電性，但因其強度不夠，並不適用於尺寸太小之微細電極製作；因此本研究，利用碳化鎢本身具有的高硬度、高強度特性來當做實驗電極，並結合精密研磨、陽極解離、超音波加工…等方法來完成微電極的製作。
在陽極解離的過程中，電極上會附著一層解離層，此時若施以超音波輔助清洗，可有效的將解離層移除。由實驗發現，利用電極特殊的位置擺放，可有效降低邊緣效應 (edge effect)；結合上述方法可容易的製作出具有高〝細長比〞的微電極，其細長比可達1000：1 (長10mm、直徑10μm）。另外，運用簡易機械手臂機構的輔助製作，也完成了超微細電極(＜1μm)。
最後，將加工出不同尺寸的微電極，利用放電加工的方法，應用於微小孔、微零件加工上。

關鍵字

超微細電極 ； 超音波輔助加工 ； 微小孔加工

並列摘要

The copper material has good conductiving but to be short of stiffness, it can't be adapted for the machining of microelectrode. In this study,of high strength and hardness, tungsten carbide material was selected as electrode in experiments which was machined by a combined sequence process of electrochemical anodic etching, ultrasonic aided machining, and precision grinding.
Ionized particles of the anode can be effectively removed by the agitation of an ultrasonic mechanism during electrolysis. In addition, “edge effect” can be improved by adding an auxiliary cathode. Microelectrode can be easily achieved to smaller than 10μm of 10mm in length. Which has ultra high L/D ratio (1000:1) by this method. Besides, a manipulator was designed for the manufacturing of fine electrode (<1μm).
Finally, microelectrodes can be processed by the proposed technology to desired size for the machining of micro-holes and micro-parts in EDM process.

並列關鍵字

fine microelectrode ； ultrasonic aided machining ； machining of micro-holes

參考文獻

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