微鑽頭加工之研究

A Study of Manufacturing Technology of Micro-Drills

吳群祥(Chun-Hsiang Wu)

指導教授 ： 翁豊在

國立虎尾科技大學/工程學院/機械與機電工程研究所/碩士(2011年)

摘要

電化學加工本身具有高的材料移除率、良好的表面品質以及無毛邊、無殘留應力…等特性；因其設備簡單、價格便宜，故具有相當的發展潛力。
碳化鎢材料除了具有高強度、高硬度之外，還尚有耐磨損、耐腐蝕、耐高溫等特性；因此本研究中以直徑110μm的碳化鎢微鑽頭利用陽極解離、超音波輔助加工等方法來進行製作；本實驗主要以食鹽水溶液為電解液，並與CuSO4兩種溶液的效果差異進行比較。
實驗過程中，以酸、中性等鹽類電解液探討對陽極材料的移除率以及表面粗糙度之影響；然而本實驗先以直徑50μm之微電極作為測試用之材料，其實驗參數以電解液濃度、加工電流並配合電解時間來控制加工過程，從中找出較佳的製作微型鑽頭之電化學蝕刻方式。
在電解液濃度10wt%、電流0.3mA、刀具間距1.5mm於電解時間1hr的加工條件下，製作出直徑90μm之碳化鎢微鑽頭；所製成的碳化鎢微型鑽頭日後可提供CNC進行陣列微小孔加工。

關鍵字

印刷電路板 ； 陽極解離 ； 超音波輔助加工 ； 微型鑽頭 ； 微電極

並列摘要

Electrochemical process itself has a high material removal rate, good surface quality and no edges, no residual stress … etc. The equipment is simple, inexpensive, and therefore has considerable potential for development.
In addition, to tungsten carbide material not only with high strength, high hardness, but also has wear resistance, corrosion resistance, high temperature resistance, and other good characteristics. In order to achieve 110μm diameter tungsten carbide micro-drills ultrasonic-assisted processing methods is used for production in electrochemical anodic etching. NaCl and CuSo4 solution were selected as electrolyte, in the experiments.
During the experiments, the influence of electrolyte was discussed. Material removal rate and surface roughness were investigated. A diameter of 50μm of the micro-electrode was selected as sample material, the appropriate experimental parameters of electrolysis concentration, current, and time were obtained for the process.
A diameter of 90μm tungsten carbide micro-drills was produced at concentration 10wt%, current 0.3mA, time 1hr. Processed tungsten carbide micro-drills can be used for the array micro-hole machining.

並列關鍵字

Printed Circuit Board ； Electrochemical Anodic Etching, ； Ultrasonic Aided Machining ； Micro Drilling ； Micro-Electrodes

參考文獻

【23】 林正豐，「微、奈米電極製作與微米陣列孔加工之研究」，國立虎尾科技大學機械與機電工程研究所，碩士論文，2006年。

【2】 B. H. Yan, F. Y. Huang , “Micro-hole machining of carbide by Electric Discharge machining”, Journal of Materials Processing Technology. 87, 139-145, 1999.

【3】 Kuo. C. L. , Masuzawa, T. and Fujino. M., “High-Precision Micro-nozzle Fabrication”, Proc. IEEE Micro Mechanical Systems, pp.166-121, Feb., 1992.

【8】 Z. N. Guo, T. C. Lee, T. M. Yue, W. S. Lau,“A study of ultrasonic-aided wire electrical discharges machining”, Journal of Materials Processing Technology, 63, 1997, pp.823-828.

【9】 J. H. Zhang, T. C. Lee, C. L.Wu, C. Y. Tang,“Surface integrity and modification of electro-discharge machined alumna-based ceramiccomposite”, Journal of Materials Processing Technology. Vol. 123, 2002, pp.75-79.