角度偏差顯微鏡之研製

Study on Angular Deviation Microscope

施柏源(Bo-Yuan Shih)

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2006年)

摘要

本論文係有關於一項角度偏差顯微鏡之研發與分析，在於提供一 種結合共光程外差干涉及表面電漿共振(SPR)的顯微方法。利用外差 光源射向待測物，經待測物反射或折射作為測試光，使該測試光產生 表面電漿共振，取得其測試光兩邊界光之相位差，以此二相位差的變 化量求得該測試光的角度偏差量，再依此角度偏差量計算出該待測物 的位移量，高度差，折射率差，或波長值，利用掃描方式求出待測物 之表面起伏，折射率或波長分佈，並作圖顯示或輸出結果，藉此分析 光學顯微鏡之解析度與量測範圍。其具有不受環境影響之高穩定性、 高靈敏度(S= 0.205 degree/nm) 、高解析度( 相位解析度可達 0.065°，位移量解析度可達0.3 nm )及高量測範圍( ±10 μm)等優點。

並列摘要

A new optical microscopy with several micron measurement range and
nanometer longitudinal resolution based on surface plasmon resonance
(SPR) angular effect and heterodyne interferometry is proposed. A
heterodyne light is focused on a specimen and reflected from it. The light
beam is then incident into a SPR angular sensor. As the specimen is
defocus, the reflected light will converge or diverge. The phase variation
between two marginal rays of the test beam due to the angular deviation
and SPR effect is proportional to the defocus and measured using a
photodiode array and heterodyne technique in real-time. It has some
merits such as simple, stable, cheaper, larger measurement range
(±10 μm), very high sensitivity (S= 0.205 degree/nm) and resolution
( σ φ= 0.065 °, R = 0.3 nm ).

參考文獻

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