新型多自由度振動量測系統

The Multi-degrees-of-freedom vibration measuring system

謝東賢(Tunghsien Hsieh)

國立虎尾科技大學/工程學院/動力機械工程研究所/碩士(2006年)

摘要

由於現今微精細加工的需求和加工技術已跨入奈米，因此工具機在工作時產生的微小振動都可能成為決定產品是否能達到所要求精密度的重要關鍵。為了能夠提升工具機的加工精度與加工品質，所以必須要有一套適當的量測的工具與方法來改善這些因為微小振動所引發的加工精度誤差。
本研究主要利用一多光路設計及相關鏡組(分光鏡、角隅稜鏡、可被光源覆蓋平面反射鏡)，成了多自由度振動量測法，使用簡便元件組成，如此一來可以減少量測儀器的使用數量，並可減少儀器所造成的誤差，還能降低儀器所需經費，而且同時可減少量測的繁複步驟，並且能精確的量測出多自由度振動位移和在經由快速傅立葉轉換，找出其頻率大小，希望由振動的頻譜量測進而分析機台運轉時所造成的振動特性，藉以分析。所設計量測架構具有簡單之特點，未來對於微小化與商品化非常有潛力。

並列摘要

Today, the accuracy of products of micro-manufactures is required higher. When machine tools are worked, the lower accuracy resulted from the error of machine tools. In order to increase the accuracy of machine tools, many measuring systems are developed by the researchers. The vibration measurement is one of these researches.
In the paper to using specially designed optical paths and the quadrant detectors, capable of measuring Multi-degrees-of-freedom motion errors. The measurement system comprises reflectors, beam splitters, corner cubes, convex lens, and quadrant detectors.
The Multi-degrees-of-freedom measuring systems are demonstrated by some practical examples in this for illustrating its usefulness and future application.

參考文獻

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