次微米級光學直度尺應用於精密掃描平台即時直度誤差補償之研究

The Study On Real-Time Straightness Error Compensation For A Linear Stage Using A Submicron Optical Straightness Measuring System

鄧聖耀(Sheng-yao Deng)

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2006年)

摘要

精密平台運動多以光學尺作為其線上即時定位量測，提供回饋訊號 進行定位控制，因此在每一移動軸皆會安裝一支相對應的光學尺進行移 動定位量測，但是對於每ㄧ個移動軸在水準直度誤差並無法量測。 本論文為運用雷射配合四象限檢測器發展一種光學直度尺，可應用 於線性平台提供直度誤差量測，並可回饋檢測器訊號至控制單元進行對 平台之直度誤差補償，此技術系統架構簡單，且系統元件容易架設於移 動平台上，此補償技術能降低線性平台之真直度誤差。光學直度尺量測 系統其量測解析度可達0.1μm。 最後為驗証此光學系統，架設至一雙軸平台進行直度量測及補償， 實驗結果並由HP 直度量測系統驗証，線性平台經即時補償後，其平台真 直度誤差可由原先20μm 補償至± 0.6μm 以內，由驗證結果，此應用安裝 於掃瞄平台將可減少其量測誤差，在未來期能更廣泛運用於精密加工儀 器。

並列摘要

The optical encoder is mostly used in conduct real time immediately
positioning measuring for the motion of precision platform, which providing
feedback signal for positioning control. Therefore, the optical encoder will be
assembled on every axes to do positioning measurement. But it can not
measure the error of horizontal straight for each axis.
In this study, the laser , quarter detector (QD) and many corner cubes are
assembled to develop a optical straightness ruler, which can applied on linear
platform that provides straightness error measurement, and provided feedback
signal to controller for compensating the straightness error of the platform.
The system structure is simple of this technique, and system devices can
easily set up on the motive platform, the technology of compensator can
reduce the straightness error of the platform. The resolution of optical
straightness ruler measuring system can be reached ± 0.1μm .
For verifying the optical system , we will set up an even axes platform to
proceed straightness measurement and compensator , the result of experiment
will verify by straightness measurement system , the linearly platform after
real-time compensating ,the straightness error of platform can reach ± 0.6μm ,
through the proof result .The application fit in three dimensions measurement
cot that will decrease the measurement error , we expect that it will apply in
the precision working implement in the future.

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