精密平台直度與角度即時量測光學系統之開發

Development of a real-time optical measuring system for the straightness and angular error of precision stage

黃俊堯(Jing-Yao Huang)

指導教授 ： 張益新

共同指導教授 ： 劉建宏

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2009年)

摘要

本文提出一種新型的線上直度誤差與角度誤差的光學式量測法，其量測方式為運用準直的不可見光LED配合一維的二象限檢測器，及運用DVD光學讀寫頭與二維的四象限檢測器發展一套光學檢測系統，可應用於線性平台提供直度與角度誤差量測，並可回饋檢測器訊號至控制系統單元進行平台之直度誤差補償，平台為利用撓性結構建立精密定位系統，並以壓電做為其致動器，提供平台水平方向的運動，此技術系統架構簡單、量測迅速，且系統元件容易架設於移動平台上，有利於平台線上作業，補償技術能有效降低線性平台之真直度誤差。最後為驗証此光學系統，架設至線性運動平台進行角度與直度量測及直度補償，實驗結果並由雷射干涉儀(HP)直度量測系統與SIOS雙光束干涉儀角度量測系統驗證之。
線上即時量測直度誤差與角度誤差訊號，透過PI控制器，對平台直度誤差做補償機制，直度量測解析度可達0.06μm ，補償後平台直度誤差可控制在±0.25μm內。

關鍵字

直度誤差 ； 角度誤差 ； 壓電致動器 ； 四象限檢測器

並列摘要

This paper proposed a novel online optical measurement method for straightness error and angular error of the stage. The proposed system is composed of a light emitting diode (LED) with un-visible light, a one-dimensional detector, a DVD pickup and a two-dimensional quadrant detector (QD). The proposed system can be used to measure the straightness error and the angular error of the linear moving stage and also can feedback the signal to compensate the straightness error of the stage by using controller unit. The high precise position system is constituted by using flexure structures. The piezoelectric unit is used for the actuator. The horizontal direction movement of the stage is provided by piezoelectric actuator. The proposed method exhibits advantages: (a) the structure is simple, measurement quick and easy to setup for online stage working and (b) the compensative technique can be used to reduce the straightness error of the linear moving stage. The proposed system is setup on the linear moving stage to measure the straightness error, angular error and to compensate the straightness error of the stage. The proposed measurement system is verified by the HP 5529A Laser straightness calibration system and the SIOS dual-beam interferometer angular calibration system.
The online straightness error and angular error measurement signal is used to compensate the straightness error of the stage by using PI controller. The resolution of the straightness measurement is 0.06 μm. The resolution of straightness measurement of the stage is about ±0.25 μm

並列關鍵字

straightness error ； angular error ； piezoelectric actuator ； quadrant detector

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