塑膠基板上沉積防水膜之研究

The study of water-repellent films deposited on plastic substrates

吳政洋(Cheng-Yang Wu)

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2006年)

摘要

本研究在室溫環境下利用電漿增強化學氣相沉積系統，分別使用四甲基矽烷和三氟甲烷為源材料，提升塑膠基板的防水特性，並建立最佳化製程條件。研究結果顯示，分別以四甲基矽烷和三氟甲烷為源材料在適當製程條件下，具有碳-氫及碳-氟等疏水基團，可以有效提升塑膠基板的防水特性，而在最佳化製程條件時，其水滴接觸角可達到100°以上。
此外，使用四甲基矽烷為源材料在最佳化防水膜製程條件下，觀察製程過程中氧氣氣體參與化學反應對於所沉積薄膜防水特性之影響。研究結果顯示，單獨使用四甲基矽烷為源材料所沉積之薄膜，具有明顯的碳-氫以及矽-碳-氫等疏水基團，可以有效提升薄膜的防水特性。而當製程過程中加入氧氣氣體參與化學反應所沉積之薄膜，雖然可以改善基板的硬度及平整性，然而，此時薄膜產生具有親水特性之矽-氧-氫親水基團，劣化了塑膠基板的防水特性。
接著，使用四甲基矽烷和三氟甲烷為源材料，觀察製程過程中兩種混合氣體參與化學反應對於所沉積薄膜防水特性之影響。研究結果顯示，在不同氣體流量比之製程條件下，皆具有明顯的碳-氫以及矽-碳-氫等疏水基團，可以有效提升薄膜的防水特性。
最後，針對單獨以四甲基矽烷、三氟甲烷及四甲基矽烷和三氟甲烷混合為源材料所沉積之薄膜，進行環境穩定性測試。研究結果顯示，隨著老化時間(aging time)的增加，薄膜本身的防水特性並沒有產生明顯地變化。因此，藉由環境穩定性的測試中可以得知，以四甲基矽烷及三氟甲烷為源材料所製備之防水膜，具有優異的環境穩定特性。

並列摘要

In this study, the water-repellent films were deposited on the plastic substrates at room temperature using plasma enhanced chemical vapor deposition with tetramethylsilane or trifluoromethane raw materials. The water contact angle depends on various deposition conditions were discussed. A water contact angle higher than 100° was obtained from the optimal deposition condition concluded from various deposition conditions. As a result, the plastic substrates possess superior water-repellent property were achieved from an adequate raw material and deposition condition.
Moreove, the effect of oxygen contents on the property of hydrophobic thin films observed from the optimal deposition condition with tetramethylsilane raw materials. As a result, the thin film has obvious carbon-hydrogen and silicon-carbon-hydrogen hydrophobic groups with tetramethylsilane raw material alone. And these groups can increase the water-repellent property. The existence of hydroxyl group prepared with an additive oxygen gas was responsible for the decrease of hydrophobic properties. However, the associated film hardness and surface roughness were apparently improved at an adequate mixing tetramethylsilane and oxygen precursor.
In addition, the effect of mixing gases on the property of hydrophobic thin films observed with tetramethylsilane and trifluoromethane raw materials. As a result, the thin film has obvious carbon-hydrogen and silicon-carbon-hydrogen hydrophobic groups on different conditions of gas flow rate. And these groups can increase the water-repellent property.
Finally, the environment stability test was focused on the thin films that were deposited with tetramethylsilane, trifluoromethane, and mixes of raw materials respectively. As a result, the water-repellency of thin films themselves didn’t change obviously with increasing the aging time. Therefore, water-repellent films were prepared with tetramethylsilane and trifluoromethane raw materials had the significant environment stability by the environment stability test.

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