積體光學高分子光波導研製

Fabrication of integrated-optics polymer waveguide

吳坤霖(Kun-Ling Wu)

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2007年)

摘要

光纖通訊具有傳輸容量大，保密性好、無感應性佳等許多優點。光纖通訊現在已經成為當今最主要的有線通訊方式。利用光波導作為接收端來傳遞光訊號，已經是相當重要的技術。

光通訊產業中平面光波導技術(Planar Lightwave Circuit, PLC)是運用半導體製程來大量製作功能複雜的積體光學元件的技術，生產具有光波導的光通訊元件，可符合未來輕薄短小及低成本的趨勢， 特別是在DWDM 光通訊元件的製作技術上，目前市面上主要為AWG (Arrayed Wavelength Grating)及分光器(Splitter)，平面光波導已逐漸成為未來光通訊元件的主導技術。

在論文中，將介紹結合黃光微影及軟式模仁之技術，製作高分子光波導；此技術具有容易製作、極低的光損耗及低成本之優勢。其光學傳輸特性，以CCD光偵測器所測量得知。

並列摘要

There are many advantages in Fiber-Optic Communications System. They are large volume, well secrecy and low noise. Fiber-Optic Communication is already the major of Line Communications. It is already very important technique to receive optical signal by optics waveguide.

Base on semiconductor fabrication technologies, Planar lightwave circuit (PLC) can be built with complex functions and produced massively. These optical components might conform to the future small size and the low cost tendency. Especially the DWDM module in optical communication system, PLC technologies can be applied to AWG and splitter. PLC technology has gradually become the leading technology in optical communication components.

In this thesis, we will use a novel technique to fabrication of polymer waveguide, which incorporates with the photolithography and sofe molding. This technique has the advantages such as simple treatment, low loss and fabrication economy. The optical transmission characteristics were measured in IR-CCD.

參考文獻

[ 1 ] Jae-Wook Kang, Jang-Joo Kim, Jinkyu Kim, Xiangdan Li, and Myong-Hoon Lee, “Low-loss and thermally stable TE-mode selective polymer waveguide using photosensitive fluoriated polyimide,” IEEE Photon. Technol., vol. 14, pp. 1297-1299, 2002.

[ 2 ] A. Neyer, T. Knoche, and L. Müller, “Fabrication of low loss polymer waveguides using injection moulding technology,” Electron. Lett., vol. 29, pp. 399-401, 1993.

[ 4 ] 黃建誠，“感光高分子之積體光學光波導之研製”，國立虎尾科技大學光電與材料科技研究所，2004/6。

[ 5 ] Anadi Mukherjee, Ben Joy Eapen, and Swapan K.Baral, “Very low loss channel waveguides in polymerthylmethacrylate”,Appl. Phys. Lett. 65, 3179(1994)

[ 6 ] Chang-Yen, D.A.；Eich, R.K.；Gale, B.K.；“A Monolithic PDMS Waveguide System Fabricated Using Soft-Lithography Techniques”, Lightwave Technology, Journal of Volume 23, Issue 6, June 2005, pp. 2088-2093.