感光高分子之積體光學波導之研製

The Study of Fabricating Integrated Optics Waveguides using Photosensitive Polymer

黃建誠(Jian-Cheng Huang)

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2004年)

摘要

本論文是研究如何利用感光高分子材料製作光波導。利用感光高
分子材料，經 UV 曝光，使材料中的分子鍵固化時，且在同一時間內，
外加微小電場，使感光高分子材料的折射率改變，以此特性來製作為
光波導之底披覆層 (bottom cladding) 及導光層 (core)，並以稜鏡耦合儀
量測材料之折射率。
在製程過程中，以 ITO 玻璃為基板，在 ITO 玻璃上成長一層低
折射率的感光高分子薄膜，以此作為光波導之底披覆層 (bottom
cladding)，再以此薄膜成長一層高折射率的感光高分子薄膜作為光波
導的導光層 (CORE)，再長一層上披覆層。利用此簡單方式形成光波
導，並量測光波導的特性。

並列摘要

In this paper, we are researching on the fabrication of waveguide
using Photographic Polymeric Materials. By exposure of Photographic
Polymeric Materials to solidify Chemical Bonds of materials, additional
voltage to change the refractive index of Photographic Polymeric
Materials at the same time. Using this characteristic to fabrication the
bottom cladding and the core of waveguide. Finally measured the
refractive index of Photographic Polymeric Materials by Prism coupler.
ITO to be a substract and grow up a Photographic Polymeric thin
film layer with low refractive index, that is the bottom cladding of
waveguide. And then grow a Photographic Polymeric thin film layer with
high refractive index to be the core of waveguide. Finally grow up a
cladding to formed waveguide and measured characteristic.

參考文獻

[1] S.E. Miller, "Integrated optics:an introduction," Bell. Syst. Tech. J.,

vol.147, pp.123-126, 2000

and C.C. Ziling "Electro-optic Effect in Proton Exchanged LiNbO3 and

[4] T.Fujiwara, Member, IEEE, X.F. Cao, and R.V. Ramaswamy, "Photorefractive

Lee, "Low-Loss and Thermally Stable TE-Mode Selective Polymer