微元件界面間表面力理論分析與實驗量測

Theoretical Analysis and Experimental Measurement of Surface Forces between Contacting Surfaces of Microparts

戴毅明(Yi-Ming Tan)

國立虎尾科技大學/工程學院/機械與機電工程研究所/碩士(2007年)

摘要

隨著現在科技越來越發達，光學通訊、高密度儲存器、綠色能源與生物醫學上的應用逐漸增加，越來越多的研究專注在微機電系統，然而在微機電元件的運轉與製造方面，仍有許多與力學、表面化學與材料科學相關的難題，阻礙著微機電商業化的快速發展。就微機電元件而言，慣性力由於體積的快速減少，如黏附與摩擦等表面力現象在大面積/體積比的情況下，越來越顯得重要，而且在微機械或精密機械具有相對運動之接觸表面間，實際上常存在有不同外來粒子、磨屑等，而這些因素均會影響接觸面間之黏附、磨擦、磨損與熱效應。
基於上述影響接觸面之重要因子，本文建構利用彈性、塑性、彈塑性變形接觸面積，推導出具有尺寸效應之黏附磨擦係數、波峰變形磨擦係數、顆粒變形磨擦係數、棘輪磨擦係數，建立界面間具有尺寸效應之完整磨擦特性模式，再由理論分析矽與鍺兩種材料之表面磨擦特性，。並且利用表面力量測儀(AFM、Nanotest)之測量結果與分析結果比對，其中証明了在不同的接觸情況下，磨擦力的各種分項，分別對表面性能造成相當重要的影響。

並列摘要

With the increasing interest and application in areas such as optical communication, high density storage, green energy and biomedicine, more and more attention is being paid on the research in micro-electromechanical system (MEMS). However, there are serious issues related to mechanics, surface chemistry and material science in the operation and manufacturing of many MEMS device, and these issues are preventing an even faster commercialization. In micro device, inertial force is reduced as the weight of the component reduces rapidly. Surface forces, such as adhesion and friction, become significant factor under the condition of the large surface area-to-volume ratio. In the MEMS and precision machine particles are often presented at contact interfaces. And these factors will affect the adhesion, friction, wear and thermal properties between the contact surfaces.
This work calculate elastic contact area, plastic contact area, elastic-plastically deformed contact area, adhesion friction, deformation friction and ratchet friction between the contact surfaces and manipulatio AFM and Nanontest to compare date. There is to be prove all kinf of friction that is important for surface in different kind.

參考文獻

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