非掃描非干涉強度型三維光學表面形貌儀與顯微鏡之研究

Non-Scanning Non-Interferometric Intensity-Type Three-Dimensional Optical Profilometers and Microscopes

譚振台(Chen-Tai Tan)

指導教授 ： 邱銘宏

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/博士(2012年)

https://doi.org/10.6827/NFU.2012.00090

摘要

本系列之研究精髓是以測試光於投射於待測物後在光學系統上所誘發角度偏向並結合CCD光強影像分析來描繪出其三維表面形貌。因待測物的表面輪廓變化正比於平行四邊形二次內反射率，且反比於二次內反射率對外角間之斜率，最後我們得到s 偏光曲線反射率對外角的斜率的較為平緩，其角度靈敏度較小，但可量測之縱向高度範圍較大，所得之表面形貌變化反應較為緩和與真實。雖然p偏光曲線反射率對外角斜率較為陡峭，其角度靈敏度較高，但可量測之縱向高度範圍較小，所得之表面形貌變化反應較為強烈。由一個物鏡與一個透鏡所形成之共焦透鏡組合加入實驗架構讓行經透明待測物之光線不因待則物表面變化而導致入射CCD之光線發生發散或收斂之現象，最後造成量測不準的情形。而且本系列研究囊括穿透式與反射式架構，放大倍率可從十幾倍到一千多倍，並可視待測物大小調整倍率。其優點為非破壞性、非接觸性量測，無干涉，因此不需有繁複的相位解析，且組裝容易，易於操作又可作即時大面積之表面形貌量測。

關鍵字

形貌儀 ； 顯微鏡 ； 臨界角 ； 內反射率

並列摘要

The essence of study is based on the reflectivity-to-height transformation and using the CCD imaging technique to build up a new three-dimensional profilometer or microscope. According to the basic geometrical optics, the test ray angle on the test surface is proportional to the slope of the surface. The deviation angle from the optics axis is also proportional to the slope and inversely proportional to the magnification of optical system. We used the confocal configuration to build up the optical system and to magnify the image of the specimen. The output ray angles are sensed based on the critical angle method. Because of its high angular resolution, the intensity pattern is sensitive to the surface profile. Comparing with the intensity pattern of total-internal reflection, the reflectivity profiles are obtained. As mentioned above, we should use a CCD sensor to be located at the image plane and to record either the critical angle image or the TIR image in real time. Overlapping these two images is well. The reflectivity profile can be transformed into the surface profile immediately. From the Fresnel’s equations, although the sensitive of height in the p-polarization light in twice internal reflection is more than that of in the s-polarization light, the image quality of the s-polarization light is better and the dynamic range of height is larger. In this paper, a series of studies on the 3-D profilometer and microscope are presented. The optical configurations contain the reflection and transmission types and the magnification is increased from 10 to 1250 times, where the specimens including any kind of transparent and opaque objects are measurable. The 3-D profile plotting is like as taking a shot without scanning. The advantages of this method are non-destructive, non-contact, and non interferometric, so it does’nt need a complicated phase analysis. In addition, it has other merits, such as, easy assembly, easy operation, large area testing, and real time 3-D measurements.

並列關鍵字

profilometer ； microscope ； critical angle ； internal reflection

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