陣列式浸筆奈米微影術之轉印機制應用研究

Study on the Transfer Mechanism of Dip-pen Nanolithography Array

吳宗澤(Tsung-Tse Wu)

指導教授 ： 翁豊在

共同指導教授 ： 方得華

國立虎尾科技大學/工程學院/機械與機電工程研究所/碩士(2011年)

摘要

浸筆奈米微影術（Dip-pen Nanolithography, DPN），為一種可如同羽毛筆般“直接書寫”的高解析度奈米微影術，可藉由操縱原子力顯微鏡，並以懸臂樑探針當為“筆”，尖端沾上“墨”（例如:自組裝分子等化合物），並以基板為“紙”，便可直接在基板上直接進行奈米圖樣的繪製，但這項技術卻有著產能不足的致命傷，為了改善這項缺點，本研究藉由將單根懸臂探針的形式改良為陣列的形式，達到高產能的訴求。
本研究藉由分析計算陣列式DPN探針的形貌、間距、曲率半徑、速度，系統的沉積溫度、以及系統濕度等條件下的分子轉印機制、水橋影響、表面吸附影響、轉印量、擴散機制、以及成形樣式等進行研究，再藉由操縱原子力顯微鏡，並完成以自組裝分子（十七烷基硫醇）為墨水、金薄膜基板為紙的轉印機制，最後再藉由接觸角、原子力顯微鏡儀器完成接觸角、親疏水性、表面能、表面形貌的量測。

關鍵字

浸筆奈米微影術 ； 陣列 ； 自組裝分子膜 ； 分子動力學

並列摘要

Dip-pen nanolithography (DPN) has been proven to be a useful tool for the direct writing of diverse nanopatterns on substrates. In DPN, an atomic force microscope (AFM) tip is used to deliver desired molecules, such as self-assembled monolayers (SAMs). The tip is used as a nanoscale pen, allowing high-resolution patterning with a number of molecular inks on a variety of substrates. DPN with a single probe tip can arbitrarily create patterns with high resolution and registration, but its throughput is limited. Therefore, a DPN array technique is developed in this study.
In this study, the Effects of the type of probe tip, distance between probe tips, deposition temperature, probe tip velocity, probe tip radius, and humidity on the SAMs transfer process are evaluated in terms of molecular transference, alkanethiol meniscus characteristics, surface adsorption energy, surface adsorption force, number of transferred chains, diffusion coefficient, and pattern characteristics.

並列關鍵字

Dip-Pen Nanolithography ； array ； Self-Assembly Monolayer ； Molecular Dynamics

參考文獻

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