- 學位論文
結合AHP與TOPSIS方法於半導體廠評選設備供應商之研究
Semiconductor Equipment Supplier Evaluation Using AHP and TOPSIS
摘要
台灣目前當紅的半導體產業，目前正積極朝向如何將半導體元件之體積尺寸縮小、如何增加生產速度、如何研發更適合之新複合式材料等等。但同時為了配合日新月異的新製程，且工欲善其事，必先利其器，所以必須使用新的設備來配合。因此，半導體生產設備研發技術是否能有所突破，就變成下一代先進半導體製程開發是否順利的關鍵。 就現實面來看，目前半導體製造商在新型設備引進之評選過程皆處於被動的狀態，往往欠缺嚴謹的考慮，但隨著半導體製程技術之瓶頸逐一浮出檯面，半導體製造商為取得技術領先之地位，勢必不能只是被動的等待設備供應商提出解決方案或是新的機台，而是應該主動積極參與設備規格的制定與新機台之研發。另外，設備供應商與半導體製造廠的關係從裝機期、保固期、到脫離保固期之後的維修與零件的更換等，半導體製造廠都必須和設備廠商密切合作。因此，兩者之間的合作關係非一時之交易，而是長久的共生關係。 本論文希望從目前文獻中所記載之半導體製造商評選設備廠商時可能考量之因素或特質中，經由多準則決策分析方法中的技術找出關鍵的因子，藉由此結果能讓目前的半導體製造商來作為評估合作設備廠商的一個參考依據，亦可讓設備廠商做為自身推銷重點或檢討改進之項目。經由文獻探討的整理結果，本論文將半導體製造商評估設備廠商之主要因素分為四個評估準則：生產管理、經營管理、未來發展以及營運狀況。在其容許的範圍內賦予適當的分數，再以層級分析法（analytic hierarchy process，AHP）評估準則間之相對全重，最後以理想解類似度順序法（technique for order preference by similarity to ideal solution，TOPSIS）加以排序，以建立半導體設備供應商之評選模式，並以實例說明模式之可行性。 關鍵詞：設備供應商評選、多準則決策分析方法、AHP、TOPSIS
並列摘要
Semiconductor industry is the most popular and important industry in Taiwan. All these industry are actively introduce new produce process to reduce components size and increase production speed, also hope to find suitable new materials, but in order to suitable for this new process, Semiconductor industry must investment new equipment to fit for this process, therefore, how to improve semiconductor produce equipments ability and suitable for next generation semiconductor produce process develop become the most important factor in this industry. The semiconductor manufacturers to introduce new equipment for the selection process are in a passive state, Semiconductor manufacturers are often lack of rigorous consideration and surfaced from the bottleneck process, in order to ensure their position in the semiconductor industry, manufacturing business is bound to not just passively waiting for equipment suppliers of the solution or a new machine, but should take the initiative to actively participate in the development of equipment specifications for new machines and production technology research and development. In addition, equipment suppliers and semiconductor manufacturers installed period from the relationship, out of warranty to the warranty period, regardless of equipment maintenance, or replacement of parts, manufacturing equipment, manufacturers must maintain close cooperation and collaboration. This research hopes to record the current literature in the selection of equipment for semiconductor manufacturers. Each manufacture may consider the factors or characteristics and through multi-criteria decision analysis methods to identify the key factors of technology. This research result shows the present semiconductor manufacturing providers to assess the co-operation as a reference for equipment manufacturers; also show equipment manufacturers sell itself as the focus of the review or improvement projects. Through the collation of the results of the literature, this paper will assess the semiconductor manufacturer equipment manufacturer's evaluation criteria are divided into four main factors: production management, business management, development and future operating conditions in their appropriate given the extent permitted by the score; AHP (analytic hierarchy process, AHP) assessment criteria relative to the whole weight between: the ideal solution to a similar degree of the final order of method (technique for order preference by similarity to ideal solution, TOPSIS) to be sorted to create a semiconductor equipment suppliers selection model, and examples of model feasibility. Keywords：Manufacture selection, Multi-criteria Decision analysis, AHP, TOPSIS