利用氧化之鎳金屬誘發氧化鈦薄膜光觸媒特性之研究

本論文研究主旨在於降低氧化鈦薄膜於具備銳鈦礦晶體結構所需之溫度，並且提高其光觸媒特性之效能，以利應用於日常生活上。本研究利用薄鎳金屬經熱處理後所形成之島狀氧化鎳結構為晶種層，藉以誘發利用電漿增強化學氣相沉積法沉積非晶氧化鈦薄膜(a-TiOx)的結晶特性，運用其鎳金屬與鈦金屬之氧化電位差異，補償氧化鈦薄膜沉積時所產生的氧缺陷(defect)，降低二氧化鈦薄膜的銳鈦礦結晶溫度並改善薄膜品質，優化薄膜的光觸媒效果，利用XRD、FTIR、AFM、EDX、FE-SEM分別觀察二氧化鈦薄膜經由不同溫度熱處理後之晶體結構，化學鍵結特性、表面型貌、元素成分以及表面型態。研究結果顯示，當鎳金屬層經氧氣熱處理後形成氧化鎳之島狀結構後，可以在較低溫時誘發出二氧化鈦銳鈦礦結構並增強其結晶特性，有效提高薄膜粗糙度與受光面積，進而提升薄膜光觸媒效能，在有晶種層之二氧化鈦薄膜經熱處理後，其可以有效延長超親水性儲存時間，當熱處理溫度達600℃時，超親水特性之儲存時間可維持12小時以上，且薄膜在低照光強度( 1mW / cm2 )下持續照光30分鐘後，即可達到水滴接觸角趨近於0°之優異超親水特性(﹤5°)，為具有防霧、除污等特性之自清潔薄膜。此外，相較於一般二氧化鈦薄膜於較高溫熱處理時，其晶體結構會由親水性優異之銳鈦礦晶相轉變成不利於光觸媒特性之金紅石結構而言，本研究中具有氧化鎳之晶種層所沉積之氧化鈦薄膜亦可以有效提高須熱處理後之二氧化鈦相轉變溫度，這些特性將可應用於建築物、汽車玻璃、空氣淨化以及廢水處理有很好的實質應用。

關鍵字

氧化鎳；誘發；氧化鈦；銳鈦礦；親水特性

並列摘要

In the study, the main objective of research to reduce titanium dioxide thin film in the anatase crystal structure have the required temperature, and enhance the performance of its photocatalytic properties, so as to facilitate application of their daily lives. In the study,nickel metal forned an island nickel oxide film as crysral layer after annealing process,so as to induce the crystallinity andoptimize the photocatalytic property for titanium oxide film deposited by plasma enhanced chemical vapor deposition. The use of its nickel atosm with a high proliferation rate, as well as nickel titanium metal and the oxidation potential differences in compensation by the deposition of titanium dioxide films produced by oxygen defect. Crystal structure, chemical bonds and surface morphologies in films were studied by XRD, FTIR, AFM andFE-SEM. The results showed that nickel metal formed a nickel oxide crystal cluster and enhanced the crystallinity. Meanwhile the crystalline phase of titanium oxide was early induced and validly increased the roughness and light receiving area of the thin film. The photocatalytic property will be improved .There are seed layer of titanium dioxide thin film after heat treatment, which can effectively extend the storage time for super-hydrophilicity, when the heat treatment up to a temperature of 600 ℃, the super-hydrophilic properties of the storage time can be maintained for more than 12 hours.The film was irradiated with ultraviolet light (1 mW/cm2) for 30 min, the film surface can obtain a super-hydrophilicity and self-cleaning effect for possessing the anti-fog and anti-pollution properties. In addition, compared with those in the titanium dioxide film on the high heat treatment, the crystal structure of Merit by the hydrophilicity of anatase crystalline phase into Photocatalyst characteristics not conducive to the rutile structure, this study has the oxidation Nickel deposition seed layer of titanium dioxide thin film can also be effective to increase after heat treatment of titanium dioxide phase transition temperature, these characteristics will be used in buildings, automotive glass, air purification and wastewater treatment have a very good application of the substance.

並列關鍵字

nickel oxide ； induce ； titanium oxide ； Anatase ； Hydrophilic property

參考文獻

【1】A. M. Ruiz, G. Sakai, A. Cornet, K. Shimanoe, J. R. Morante, N. Yamazoe, Sensors and Actuator B 93 (2003) 509

Google Scholar

【2】R. Wang, K. Hashimoto, A. Fujishima, M. Chikuni, E. Kojima, A. Kitamura, M. Shimohigoshi, T. Watanabe, Nature 388 (1997) 431

Google Scholar

【3】P. Amézaga-Madrid, R. Silveyra-Morales, L. Córdoba-Fierro, G. V. Nevárez-Moorillón, M. Miki-Yoshida, E. Orrantia-Borunda, F. J. Solís, J. Photochem. Photobiol., B 70 (2003) 45