多自由度雷射量測系統之開發

Development of Multi-Degree-of-Freedom Laser Measurement System

徐識翔(Shih-Hsiang Hsu)

指導教授 ： 劉建宏

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2011年)

摘要

本研究系利用雷射光繞射原理與順向運動學分析建構一套多自由度量測系統。系統元件包含一個雷射二極體、穿透式光柵與三個四象限光感測器(QD)與一些光學元件所構成，整體結構可分為移動端與固定端，並以雷射二極體作為傳遞移動端動作訊息的媒介，再透過固定端的光柵作光路分光，最後再分別由各個四象限光感測器(QD)作接收。此系統可應用於微型加工機具在進行微細加工時，能提供給加工機進給系統於一維線性移動軸上量測水平與垂直動作方向的直線度誤差，以及可同時用於量測俯仰度、搖擺度與滾動度之角度誤差，藉此可利於建構小型幾何誤差量測技術，並整合於微型加工機具的進給系統內，以提供線上幾何誤差的即時量測，而有效的提高微細加工機的加工精度。本研究是量測一維線性移動平台之水平與垂直方向的直線度誤差，以及該平台之俯仰度、搖擺度與滾動度之角度誤差，而實驗校正結果顯示，本系統在量測水平方向動作的直線度殘餘誤差於±50μm量測範圍內為±0.7μm；垂直方向動作的直線度誤殘餘誤差於±50μm量測範圍內為±0.65μm；量測俯仰度之角度殘餘誤差於量測範圍±50arc sec內為±0.7arc sec；搖擺度之角度殘餘誤差於量測範圍±60 arc sec內為±0.8arc sec；滾動度之角度殘餘誤差於量測範圍±100 arc sec內為±1.1arc sec。

關鍵字

穿透式光柵 ； 多自由度 ； 幾何誤差 ； 雷射 ； 繞射

並列摘要

This study used the laser diffraction theory and forward kinematic analysis to construct a multi-degree-of-freedom measurement system. The system consists of a laser diode, transmission grating, three quadrant detectors (QDs), and some optical elements. The overall structure can be divided into the moving end and the fixed end. The laser diode is used as the medium to transfer the movement message of the moving end. The grating of the fixed end is used for light path splitting, finally received by each QD. The system can be used for measuring the straightness errors in horizontal and vertical movements of the feed system for micro machine tool on one-dimensional linear shifting axle during micromachining. Moreover, it can measure the angular errors in pitch, yaw and roll, so as to construct small geometrical error measurement technology and integrate it into the feed system for micro machine tool to provide real-time measurement of on-line geometrical error, and to improve the working accuracy of micro machine tool effectively. This study measured the straightness errors in horizontal and vertical directions of one-dimensional linear mobile platform and the angular errors in the pitch, yaw and roll of the platform. The experimental correction results show that the linearity residual error of this system in measuring movements in the horizontal direction is 0.7μm within the measurement range of 50μm. The residual error of straightness error in movements in the vertical direction is 0.65μm within the measurement range of 50μm. The angle residual error in pitch is 0.7arc sec within the measurement range of 50arc sec. The angle residual error in yaw is 0.8arc sec within the measurement range of 60 arc sec; the angle residual error in roll is 1.1arc sec within the measurement range of 100 arc sec.

並列關鍵字

grating ； multi-degrees-of-freedom ； geometrical error ； laser ； diffraction

參考文獻

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