氧化鋅基壓電式奈米發電機之研製與特性分析

Fabrication and Characterization of ZnO-based Piezoelectric Nanogenerators

蔡維晟(Wei-Cheng Tsai)

指導教授 ： 姬梁文

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2012年)

摘要

氧化鋅為Ⅱ-Ⅵ族化合物半導體，具有直接能隙的能帶結構，能隙的大小為3.37 eV，所對應的波長範圍在紫外光區段，並具有高達60 meV的激子束縛能。此外，由於ZnO具有高透光率以及低電阻率的特性。因此ZnO被認為是非常重要且具有未來性的光電材料。本研究以濺鍍法於ITO玻璃基板沉積氧化鋅薄膜，利用水熱法生長其一維型式的氧化鋅奈米柱結構。在物理性能的氧化鋅奈米柱與鎳摻雜氧化鋅奈米柱生長和光學特性的實驗條件影響將以X射線繞射(XRD)，掃描電子顯微鏡(FE-SEM)，成分分析(energy-dispersive spectrometry : EDS)，紫外可見分光光度計(UV-VIS)，光激螢光(photoluminescence)，分析其一維型式奈米柱的品質。第一部份: 以ITO基板與PET基板生長氧化鋅奈米柱，之後製作上電極，與前者奈米結構組裝成奈米發電機，利用超聲波驅動其奈米發電機，在氧化鋅奈米柱成長9小時得到平均電流2.11×10-6A與平均電壓0.08V，而使用氧化鋅薄膜製作壓電式奈米發電機在撓曲後也得到良好的電壓－電流特性。第二部份:以ITO基板製作氧化鋅鎳奈米柱結構，之後製作上電極利用超聲波驅動其奈米發電機，得到3小時0.007mol 9.6×10-6A以及0.96V ，6小時0.007mol 6.02×10-5A以及0.06V，9小時0.007mol 1.05×10-5 A以及0.07V，與未摻雜的奈米柱作比較後摻雜量越多得到良好的電壓-電流。

關鍵字

氧化鋅奈米柱 ； 奈米發電機 ； 氧化鋅 ； 水熱法

並列摘要

Zinc oxide is a II-VI semiconductor material with direct band-gap of 3.37eV corresponding to the wavelength in the ultraviolet region. ZnO also has large exction binding energy (~60 meV). In addition, ZnO has low resistivity and high transparency in the visible region. As a result, ZnO is considered as a promising material for the application of the optoelectronics. In this study, ZnO film is deposited by sputter on ITO glass substrate,one dimensional type of ZnO nanorods nanostructure are grown by Hydrothermal. One dimensional type of nanostructure is analyed physical properties of ZnO nanorods and ZnO nanorods doped Ni and optical properties by XRD、FE-SEM、UV-VIS、photoluminescence.First, ZnO nanorods are grown respectively on ITO glass and PET substrate, then fabricate naogeneratator by making top electrode. Nanogenerator are driven by ultrasonic waves. ZnO nanorods are grown 9 hours and measured its voltage and current. The average current and average voltage are respectively 2.11×10-6 A and 0.08V. It can obtained well after deflecting by fabricating piezoelectric nanogenerator used ZnO films. Second, ZnO nanorods are grown on ITO glass, then fabricat top electode. We use ultrasonic waves to drive nanogenerator. The average current and average voltage of 0.007 moles are 9.6×10-6A and 0.96V at 3 hours, 6.02×10-5A and 0.06V at 6 hours, 1.05×10-5 A and 0.07V at 9 hours. ZnO nanorods with more Ni doped can obtained better characteristic of voltage – current then undoped.

並列關鍵字

ZnO nanorods ； nanogenerators ； ZnO ； Hydrotherma

參考文獻

[1]X. Wang, J. Song, J. Liu, Z. L. Wang, “Direct-Current Nanogenerator Driven by Ultrasonic Waves”, Science 316, 102 (2007)

[2] K. Hiruma et al., “Growth and optical properties of nanometer-scale GaAs and InAs whiskers” J. Appl. Phts., 77(2) , 447 (1995).

[3] Y. Li, G. W. Meng, L. D. Zhang, F. Phillipp, “Ordered semiconductor ZnO nanowire arrays and their photoluminescence properties” Appl. Phys. Lett., 76, 2011 (2000)

[5] Z. K. Tang, G. K. L. Wong, P. Yu, M. Kawasaki, A. Ohtomo, H. Koinuma and Y.Segawa,“Room-temperature ultraviolet laser emission from self-assembled ZnO microcrystallite thin films ” Appl. Phys. Lett., 72, 3270 (1998)

[6] D. C. Reynolds, D. C. Lock and B. Jogai, “Optically pumped ultraviolet lasing from ZnO” ,Solid State Commun., 99, 873 (1996)