因現今軟性顯示器具有可撓曲之優點,但其薄膜層於長時間受外力作用下易使透明薄膜層造成脆裂破壞,因此,探討軟性薄膜基材機械特性與力學行為之研究顯得極為重要。 本文以陰影雲紋法配合循環彎曲機構測試氧化銦錫(ITO)薄膜基材之機械性質,探討試片於不同加熱條件下,藉由彎曲負載機構對薄膜層進行受拉及受壓循環負載,再以陰影雲紋法結合相位移法擷取位移之原始圖像,對原始影像執行影像均等化與快速傅立葉濾波之影像處理,最後藉由相位展開法重建物體之三維形貌。為求得ITO薄膜於不同情況下之面電阻變化,於彎曲前後及受負載後24小時,持續三天紀錄薄膜之面電阻變化。 由實驗結果發現,軟性薄膜基材加熱超過80℃以上,將會隨著溫度升高,彎曲負載所產生之變形量將有逐漸增加的趨勢。於薄膜層承受拉應力負載,面電阻將會急遽升高,因此藉由光學顯微鏡觀察受負載後之薄膜表面,探討造成面電阻急遽升高之因素。
Although the flexible displays have the flexible advantages, the transparent conducting films (TCFs) deposited on the flexible substrates may generate cracks to degrade or even failure the displays. Accordingly, it is an important issue to investigate the mechanical behaviors of TCF-coated substrates. In this study, the mechanical behaviors as well as electrical properties of indium-tin-oxide (ITO)-coated on polyethylene terephthalate (PET) substrates subjected to cycling bending loadings were investigated. Different annealing temperatures were carried out to understand their influences on the tensile and compressive cycling bending loadings. A phase-shifting shadow moire (PSSM) were employed to measure the warpage and a four point probe was utilized to measure the sheet resistance of ITO films. In addition, to follow the relation between the deformation and resistance and time, the aforementioned properties were measured for 3 days after bending experiments. iv From the experimental results, it reveals that the warpage increases with increasing of bending time when the annealing temperature exceeds 80 ℃. Furthermore, the sheet resistance of ITO film considerably increases after the tensile bending loading. A microscopy was also used to observe the surface of ITO films to clarify the increasing reason of sheet resistance of ITO films.