水熱法成長鋁摻雜氧化鋅奈米柱之研究

Study of Al-doped zinc oxide nanorods by hydrothermal process

魏竹瑜(Chu-yu Wei)

指導教授 ： 蔡振凱

共同指導教授 ： 閔庭輝

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2010年)

https://doi.org/10.6827/NFU.2010.00111

摘要

本研究主要是探討針對使用低成本、低溫度的水熱法來成長鋁摻雜(Al-doped)的氧化鋅(zinc oxide)奈米柱。使用射頻磁控濺鍍機在n-type矽基板上沉積厚度約為150nm的氧化鋅薄膜當晶種層，實驗中加入了硝酸鋅(Zn(NO3)2•6H2O)和六亞甲基四銨(C6H12N4)做為主要成長奈米柱的反應物，接著再加入不同濃度的硝酸鋁(Al(NO3)2•9H2O)水溶液來提供鋁離子參與反應以達到摻雜的目的。我們是利用鋁活性大於鋅的特性以鋁來取代部份鋅原子的位置，藉由不同鋁摻雜量來改變奈米柱的導電性，利用場發射掃描式電子顯微鏡(FE-SEM)發現在添加硝酸鋁濃度在40×10-5M時晶種層會有剝離的現象，穿透式電子顯微鏡(TEM)下為單晶結構朝c軸方向成長且能量散射光譜儀(EDS)顯示有微量的鋁原子存在，x光繞射儀(XRD)下顯示氧化鋅結構並沒有破壞及扭曲，而使用光激發螢光光譜(PL)硝酸鋁濃度在6×10-5M時有最少的光學缺陷。X射線光電子能譜儀(XPS)顯示不同元素的原子比例，且隨硝酸鋁濃度增加鋁原子的含量也增加。而由I-V曲線顯示，在硝酸鋁濃度為6×10-5M時有最大的電阻值，而氧化鋅奈米柱為主要造成結構高電阻的原因。使用不同鋁摻雜量之氧化鋅奈米柱電極封裝成染料敏化太陽能電池在濃度6×10-5M時，相較於在未摻雜時有56%的效率增加。

關鍵字

氧化鋅奈米柱 ； 鋁摻雜 ； 水熱法

並列摘要

In this study, the major purpose was that using low-cost and low- temperature hydrothermal process to grow Al-doped zinc oxide nanorods. The thickness of zinc oxide film was 150nm, using RF-sputter to deposite on n-type Si substrate. Zn(NO3)2•6H2O and C6H12N4 were used to grown zinc oxide nanorods. In order to reach the doping purpose, we added Al(NO3)2 solution to provide aluminum ion to react. We utilized the characteristic of aluminum active which is better than zinc to replace some zinc atoms. The nanorods electric conductivity was changed by means of different Al-doped concentration. We found the seed layer was come off the substrate in the concentration of 40×10-5M by FE-SEM. The ZnO was single crystal structure and grew with c-axis by TEM and the EDS showed small amounts of aluminum atoms exist. By XRD diffraction the ZnO structure was not destroyed and distorted. The PL shows in the concentration of 6×10-5M has the lesser optical defects. The XPS shows the different elements of atoms proportion and we found the aluminum iron increased with the increasing concentration of Al(NO3)2. From I-V curve, the concentration of Al(NO3)2 in the concentration of 6×10-5M having max resistance. ZnO nanorods was the main reason that made the structure have high resistance. The dye-sensitized solar cell packaged with different Al-doped ZnO nanorods electrode in the concentration of 6×10-5M had the highest efficiency and more than 56% increase in undoped.

並列關鍵字

zinc oxide nanorods ； Al-doped ； hydrothermal

參考文獻

[1] Yasuhiro Igasaki, Hiromi Saito, Thin Solid Films,199, 223-230(1991)

[2] Takashi Komaru et al.,Jpn. J. Appl. Phys.Part I, 5796-5804,38(1999)

[3] J-S.Kim, Thin Solid Films,133,217(1992)

[8] Mitsuyu T, Ono S and Wasa K. J Appl. Phys.,2464.,51(5) (1980)

[9] N-J Janno, Thin Solid Films, 220,92,(1992)