以微成型技術製作光纖表面光柵之研究

本研究內容中利用研磨技術完成D型光纖結構，並結合黃光微影製程(Photolithography)與光學全像干涉微影(Holographic Interference Lithography)技術，製作出布拉格光柵於D型光纖表面，最後利用二甲基矽氧烷(polydimethysiloxane, PDMS)的材料特性以微成型方式製作出表面浮雕光纖光柵。製程中，以多模光纖特製研磨試片來進行單邊研磨(Side-Polished)。反覆的研磨拋光動作搭配光學顯微鏡的觀察，可以確認光纖逐漸趨近光纖核心直到纖蕊為止，接著進行黃光微影製程與光學全像干涉微影技術，來製作繞射光柵濾波元件；利用旋轉塗佈正光阻，將短週期布拉格表面光柵曝光於光纖平面ㄧ侧，當確認光柵表面完整之後，塗佈PDMS材料於光柵表面用來轉印細微的繞射光柵結構，接著利用高分子材料溶解光阻劑於PDMS與光纖表面組成的微流通道內，當光阻劑犧牲層被取代後曝光高分子材料，最後可觀察元件之光學反應及特性分析。這項研究中以微成型技術成功替換掉光柵本身的材料，製作出光纖表面布拉格光柵，其光柵週期與深度可由原子力顯微鏡(AFM)觀察，並且由掃描式電子顯微鏡(SEM)觀察光柵表面結構，及光學傳輸特性可由ASE寬頻光源與光纖極化器利用光頻譜分析儀(OSA)等測量與紀錄實驗之結果，並且作研究之探討。

關鍵字

D型光纖；全像干涉微影；微成型

並列摘要

In this thesis, we proposed a method for fabricating D-shaped optical fiber by polishing the surface on the fiber. After, utilizes the photolithography and holographic interference lithography technologies, which fabricated the Bragg surface grating on the D-shaped fiber. Next, we can using micro-molding process to fabricating surface-relief fiber grating by the special material (polydimethysiloxane, PDMS). During the fabrication, we first make some polishing samples to do side-polished on multi-mode fiber. It would precisely stop polishing until reaching the core of fiber. Next, we conduct to fabricate on diffraction grating filter component through photolithography process and holography interference lithography, and then it utilizes spinner to spin coating and expose the positive photoresist on core of fiber with short periodic Bragg surface grating. Moreover, and utilizes polymer to dissolution the photoresist in microchannel. After the sacrificial layer dissolution of photoresist by polymer, exposes the polymer material. Next, observed and analyzed its optical reactive features. At last, the aim of the research was to change the material for grating, to fabricate the fiber surface Bragg diffraction grating by micro-molding process. Its period and depth of grating is observed by atomic force microscope (AFM), and the results of optical transmission characteristics are measured and shown by SLD broadband light source and in-line optical fiber polarizer though optical spectrum analyzer(OSA).

並列關鍵字

D-shaped optical fiber ； holographic interference lithography ； micro-molding

參考文獻

[1] M. H. M. Klein Koerkamp, M. C. Donckers, B. H. M. Hams, and W. H. G. Horsthuis, “Design and fabrication of a pigtailed thermo-optic 1x2 switch,” Proc. Integrated Photonics Research Conf., vol. 3, 1994, pp. 274-276.

[5] Schmahl.G., and D.Rudolph, “Holographic diffraction grating,” In: Progress in Optics, E.Wolf, ed., North-Holland, Amsterdam, 14, pp. 195, 1976.

[6] Chung-Yen Chao, Cheng-Yen Chen, and and Cgee-Wee Liu, “Direct writing of silicon grating with highly coherent ultraviolet laser,” Graduate Institute of Electro-Optical Engineering and Department of Electrical Engineering, National Taiwan Unuversity, Taipei 116, Taiwan.

[7] Nishihara.H., Y.Handa, T. Suhara, and J. Koyama, “Electron-beam directly written micro grating for integrated optical circuits,” Proc. SPIE, 239:134, 1980.

[9] Y. Cheng, T. Huang, C.-C. Chieng, “Thick-film lithography using laser write,” Microsystem Technologies 9 (2002) 17–22 _ Springer-Verlag, 2002.

國際替代計量

以微成型技術製作光纖表面光柵之研究

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