爐氛圍對二氧化鈦奈米線成長之影響

Effect of Furnace Atmosphere on The Growth of Titanium Dioxide Nanowires

張文齡(Wen-Ling Chang)

指導教授 ： 劉偉隆

國立虎尾科技大學/工程學院/材料科學與綠色能源工程研究所在職專班/碩士(2011年)

摘要

本研究主要探討水氣、水氣和甲烷、水氣和氧氣、氧氣、氧氣和甲烷對成長氧化鈦奈米線的影響。首先在鈦基材上，於硫酸鹽浴中電鍍一層鎳薄膜，再將鍍有鎳薄膜的試片，置入高溫爐管中施以高溫處理，持溫900℃，持溫35分鐘，並於持溫期間通入氣氛，以化學氣相沉積方式成長二氧化鈦奈米線。
實驗結果在只通H2O的氣氛能長出氧化鈦奈米線，長出氧化鈦奈米線的O2不需太多。通H2O和CH4的氣氛中也可長出氧化鈦奈米線，分別為通水溫40℃的水氣和10sccm的CH4；水溫60℃的水氣和10sccm的CH4；水溫80℃的水氣和20sccm的CH4。
通H2O和O2的氣氛中，不規則膜狀物含有O、Ti、Ni成分，表面具有Ni、Ni3TiO5、NiO等化合物。通O2的氣氛，經由分析其結果跟上面的情形一樣。其氣氛的O2都很多，因此推測當O2太多時O容易和Ni形成化合物NiO。
通氣氛H2O或通氣氛H2O和CH4皆無Ni 成分，此時的O2皆少；通氣氛H2O和O2或通氣氛O2都能分析到Ni 成分，此時的O2皆很多。所以推測在O2少時Ni以Ni原子的形式擴散到鈦基材裡，O2多時Ni容易和O形成化合物NiO停留在基材表面。

關鍵字

化學氣相沉積 ； 氧化鈦 ； 奈米線 ； 鈦基材

並列摘要

The purpose of the study is to investigate the effect of atmosphere on the growth of titanium dioxide nanowires.The atmosphere includes water vapor, mixture of water vapor and methane gas, mixture of water vapor and oxygen, oxygen, and mixture of oxygen and methane gas. Before growth of nanowires ,the titanium substrate was electroplated on a Ni thin film in an electroplating bath.And the specimen coated with Ni film was then placed in a tube in furnace to grow nanowires. The growth temperature was 900℃ and the growth time was 35 minutes.
The results showed that titanium oxide nanowires can be grown under the atmosphere of water vapor at 900℃.The partial pressure of O2 is quite small. Titanium dioxide nanowires can also be grown under the atmosphere of H2O and CH4 at 900℃.The conditions contain a mixture of water vapor from 40 ℃water and 10sccm CH4 ﹐a water vapor from 60℃water and 10sccm CH4﹐a water vapor from 80℃water and 20sccm CH4 . Under the atmosphere of H2O and O2﹐and O2﹐only irregular films can be growth ﹐the composition of the film is O﹐Ti﹐and Ni. The partial pressure of O2 is quite high.

並列關鍵字

chemical vapor deposition ； titanium oxide ； nanowires

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