- 學位論文
利用Nd:YVO4雷射加工玻璃母模並應用於微流道中血漿毛細充填
Fabrication of Glass Mold Using Nd:YVO4 Laser for Capillary Filling of Plasma in Microfluidic Channel
摘要
本研究是以載玻片玻璃（厚度為1.1 mm）做為基板，先在玻璃表面上旋塗一層18 μm的聚二甲基矽氧烷(PDMS)做為雷射加工輔助層，使用波長532 nm的Nd:YVO4雷射在玻璃基板表面加工出微米尺寸的微結構。透過使用不同倍率的聚焦物鏡及雷射功率在玻璃表面加工出不同尺寸的微流道母模。本實驗以雷射加工功率100 ~180 mW進行熔融，結果顯示使用40倍物鏡聚焦所加工出的玻璃流道母模，寬度介於6.8~7.6 μm，高度介於1.0~1.1 μm；使用20倍物鏡聚焦加工的玻璃母模寬度介於10.0~17.0 μm，高度介於1.5~1.6 μm；而使用10倍物鏡聚焦加工的玻璃母模寬度介於14.0~19.5 μm，高度介於2.0~2.5 μm。玻璃母模接續以PDMS翻模與氧電漿接合技術，將此PDMS微流道晶片改質成親水性表面並與玻璃基板接合，製作出三種不同深度與寬度的微米級流道晶片來進行血漿毛細充填實驗。三種不同溫度的血漿(4 oC、25 oC 及37 oC)亦被使用來進行毛細充填實驗，本研究發現在相同溫度時，微流道的尺寸(寬度與深度)越大，血漿毛細充填的速度越快；而在相同尺寸的微流道下，充填的血漿溫度越高，流速亦越快。
並列摘要
In this study, a glass slide with thickness of 1.1 mm is used for laser processing. First, an 18 μm polydimethylsiloxane (PDMS) layer is spin on the glass surface to be the laser processing auxiliary layer, and then a micron-scale structure is processed on the glass surface by using a Nd:YVO4 laser with a center wavelength of 532 nm. Finally, it makes varies microchannel mold patterns on the glass surface by using a focusing objective lens at different magnification and laser power, which melts glass slide at a laser processing power of 100~180 mW. The results show that the width of the glass mold pattern processed under 40-fold objective lens focusing is between 6.8~7.6 μm and that its height is between 1.0~1.1 μm. Under 20-fold objective lens focusing, the width of the processed glass mold pattern is between 10.0~17.0 μm, and its height is between 1.5~1.6 μm. Under 10-fold objective lens focusing, the width of the processed glass mold pattern is between 14.0~19.5 μm, and its height is between 2.0~2.5 μm. Since the PDMS material is hydrophobic, the PDMS layer is modified using oxygen plasma process and bonding technology into a hydrophilic surface and then bonded to the glass mold, thus obtaining three kinds of micron-scale fluidic channel at different depths and widths for blood plasma capillary filling. Blood plasma at three different operating temperatures (4 oC, 25 oC and 37 oC) are also applied to this capillary filling experiment, which finds that under the same temperatures, the larger microchannel size (width and depth) makes a faster blood plasma capillary filling speed; however, with uniform-sized microchannels, as the blood plasma operating temperature increased, the flow rate becomes faster.