壓電材料平行配置之雙自由度奈米定位器之設計

A Piezoelectric Two-Degree-of-Freedom Nanopositioner with Parallel Design

鄭喬華(Cheng, Chiao Hua)

指導教授 ： 洪紹剛

國立交通大學/工學院/機械工程系所/博士(2018年)

摘要

此博士論文利用兩壓電元件之並聯式排列，設計了一具有平移運動以及旋轉運動之雙自由度奈米步進馬達。對兩壓電元件供給合適的電壓曲線，便可在同動模式（in-phase）下完成平移運動，而在差動模式（out-of-phase）下完成旋轉運動。此雙自由度奈米步進馬達其速率性能具良好之線性關係，而平移/旋轉之步進解析度分別為100 nm / 0.04°。
接著對此奈米步進馬達加以改良，且加入一可同時量測平移、旋轉之位置資訊之光感測器，重新設計了一雙自由度奈米定位器。此重新設計之奈米定位器加入一特殊設計之彈簧以及改善致動接觸面，因此強化了原設計之摩擦力可控性；而量測位置資訊之光感測器則解決了致動過程中發生的耦合（cross-talk）問題。最後實驗結果展現了改良後之效果，此奈米定位器純平移及純旋轉之表現也證實其外部光感測器之效用。新設計之雙自由度奈米定位器也具速率之良好之線性關係，在平移/旋轉步進解析度分別為176 nm / 0.05°。

關鍵字

壓電元件 ； 滯滑摩擦 ； 壓電摩擦慣性致動器 ； 光位移感測器 ； 耦合現象

並列摘要

This dissertation proposes a parallel design for a piezoelectric 2-degree-of-freedom nano-stepping motor, which performs translation or rotation while its two piezoelectric elements are driven in-phase or out-of-phase electrically. Compared to serial mechanism, parallel design are more compact, stiffer, and have better dynamical characteristics. Experimental results show that this device works stably. The stepping resolution/stroke values of translation and rotation are 100 nm/6 mm and 0.04°/infinite, respectively.
Furthermore, flexure springs are designed to improve the operation stability, and a 2-degree-of-freedom motion sensor is integrated to solve the cross-talk problem. Experimental results show that pure translation and rotation can be achieved. The positioning resolution values of translation and rotation are 176 nm and 0.05°, respectively.

並列關鍵字

piezoelectric element ； stick-slip ； piezoelectric friction-inertial actuator ； position sensing detector ； cross-talk

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