複合氧化物反蛋白石結構的製備與氣體感測性能分析

Fabrication and Characterization of Metal Oxide Composite Inverse Opals for Gas Sensing Applications

周佑思(Yu-Szu Chou)

指導教授 ： 吳樸偉

國立交通大學/工學院/材料科學與工程系所/碩士(2018年)

摘要

此研究利用電化學方法合成多種複合反蛋白石結構厚膜並探討其材料特性分析及氣體感測能力。本論文依主要反蛋白石結構之材料可分成兩部分：氧化鋅為主及氧化鎳為主之氣體感測器，各以二氧化鈦以及氧化亞銅兩種材料修飾形成異質接面以增強氣體感測能力。其中，這些反蛋白石之微結構以掃描式電子顯微鏡觀察，而材料的分析和結晶性則用能量色散x射線光譜及x射線繞射分析得知，也利用比表面積與孔隙度分析儀測得這些反蛋白石結構之比表面積，表面元素的組成及價態也藉由x射線光電子能譜儀量測。
在第一部分中，氧化鋅反蛋白石膜分別用三種鍍液製備。其中以添加氯離子的方式增加反蛋白石結構之表面積，形成多階層孔洞結構，並改變特定優選面以提升其氣體感測能力。另外，以二氧化鈦及氧化銅修飾之複合氧化鋅反蛋白石結構膜也藉由電化學方式合成，並探討其氣體感測能力。
在第二部分中，氧化鎳反蛋白石結構膜藉由在特定熱處理參數下將鎳反蛋白石結構氧化而得，二氧化鈦及氧化銅修飾之氧化鎳反蛋白石膜也藉由電化學方法製成且分析。純氧化鎳反蛋白石膜之氣體感測能力也有初步結果，但複合材料之氧化鎳反蛋白石膜並無法測得氣體反應，推測原因為在製程中電極被破壞之緣故。

關鍵字

反蛋白石結構 ； 複合氧化物 ； 氣體感測器

並列摘要

In this thesis, fabrications and characterizations of metal oxide inverse opals were presented for gas sensing applications. It could be divided into two parts, ZnO-based and NiO-based gas sensors, according to the main material of inverse opaline structures. SEM was used to observe the morphology of these microstructures, and the element characterizations and crystallinities were determined by EDS and XRD. BET analysis was conducted to verify the variation of surface area, and XPS was utilized to identify surface elemental compositions and their oxidation states.
In the first part, ZnO inverse opals were fabricated through electrodeposition with three different deposition bath. With the aid of Cl- ions, a hierarchical porous structure was synthesized with macro/mesopores of inverse opaline structures and additional micropores on the skeletons of inverse opals. The effects of Cl- ions were observed and discussed. Also, ZnO/TiO2 and ZnO/CuxO composite inverse opals were synthesized through electrochemical methods. The gas sensing properties of all these ZnO-based inverse opals were measured and compared.
In the second part, NiO inverse opals were synthesized by oxidation of Ni inverse opals under an optimized annealing condition. NiO/TiO2 and NiO/CuxO composites were also fabricated and characterized. The gas sensitivity of NiO inverse opals was acquired, while the responses of NiO composites were barely observed. The reason was inferred to the compromised electrode during the fabrication process.

並列關鍵字

inverse opals ； composite metal oxides ； gas sensors

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