加熱用於特殊氣體管路附著去除效應-以某半導體廠為例

現今所有高科技產業的生產製造流程中，都使用特殊氣體作為產品的重要製造元素，而特殊氣體供應與製程所產生的廢氣其特點皆為高濃度、高危險性、與高風險，故在使用與廢棄處理上皆須妥善完整的處理與完備安全防護措施。在氣體特性方面，黏滯性氣體大部分皆會附著於供應管路內部，在特氣供應系統上，使用氣瓶櫃之氣體鋼瓶有更換需求，所以在更換過程中管路內部殘存氣體容易與空氣接觸而產生管路腐蝕現象。而在製程廢氣處理系統上，黏滯性氣體經化學反應後產生黏滯性粉末而附著在排氣管路上進而造成管路堵塞。本研究使用管路加熱系統處理管路內部黏滯性氣體的去除：在供應系統上HBr與Hcl氣瓶櫃的Pigtail加裝加熱系統，在氣體鋼瓶更換前先進行Pigtail管路加熱；在製程廢氣處理系統上同樣在Pump與 Scrubber前的Pumping Line 管路上加裝加熱系統，進行管路潔淨處理。此作法可有效確實的減少管路內部的殘氣附著率，減少管路的腐蝕與堵塞情形，進而降低管路的更換與保養維護頻率並降低成本支出。進行實廠測試顯示，氣瓶櫃的Pigtail在使用加熱方法後其使用壽命可由原來的12 次更換頻率，至少延長為 25次以上的更換頻率，除減少管路腐蝕情況增加安全性能之外，更可減少管路耗損頻率降低成本支出。Pumping Line 在使用加熱方法後其使用壽命可由原來的 4次/年的保養維護頻率延長1次/年的保養維護頻率，除可減少管路堵塞情況減少人力及成本支出外，更可減少因管路堵塞而造成生產設備的停機時間與晶片損壞報廢的成本損失。

關鍵字

去除效率；氣瓶櫃；氣體管路；真空管路；加熱系統

並列摘要

All of the high-tech manufacturing process, the elements use of special gas for products manufacture, special gas and process emissions from its characteristics are the high concentration and high risk, its use and disposal are required to properly complete processing and complete security protection. In gas properties, the viscosity of gases majority will be attached to the gas pipeline internal , the gas cylinder replacement demand. Therefore, the internal residual in pipeline form the replacement process, it was easy contact with the air and lead to pipe corrosion. In the process waste gas treatment, the viscosity powder generated by the chemical reaction and that attached to the exhaust pipe cause pipe clogging. In this study, use of pipe heating removal the piping internal viscosity: Installation of heating systems on the supply system of HBr cylinders Cabinet, Pigtail was heated before the gas cylinder replacement ; Pumping line between the equipment and the pump, installation of heating systems to clean pipeline. This practice can be really effective to reduce the residual for pipeline internal attachment, reduce the pipe corrosion and plug, thereby reduce the frequency and costs of pipe replacement and maintenance. Actual plant tests showed that the cylinder cabinet Pigtail after using the heating, its useful life from 12 to replace the frequency, at least be extended to more than 25 times the frequency of replacing, in addition to reduce pipeline corrosion to increase safety performance, Also reduce piping harm to reduce costs. Pumping line heating to be reduced from 4 times / year of maintenance to extend the maintenance frequency in 1 time / year, In addition to reducing manpower and costs for piping congestion issue, Also reduce piping blockage caused process break off and chip damage scrapped.